2006
DOI: 10.1088/0031-8949/2006/t123/019
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Multi-foil optic condenser for a laser plasma EUV source

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Cited by 7 publications
(4 citation statements)
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“…As an example, lobster eye optics can be modified for efficient collection of laser-plasma radiation for wavelengths longer than 8 nm [66]. The optics for this application consist of two orthogonal stacks of ellipsoidal mirrors forming a doublefocusing device [66].…”
Section: Lobster Eye Laboratory Modificationsmentioning
confidence: 99%
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“…As an example, lobster eye optics can be modified for efficient collection of laser-plasma radiation for wavelengths longer than 8 nm [66]. The optics for this application consist of two orthogonal stacks of ellipsoidal mirrors forming a doublefocusing device [66].…”
Section: Lobster Eye Laboratory Modificationsmentioning
confidence: 99%
“…As an example, lobster eye optics can be modified for efficient collection of laser-plasma radiation for wavelengths longer than 8 nm [66]. The optics for this application consist of two orthogonal stacks of ellipsoidal mirrors forming a doublefocusing device [66]. The ellipsoidal surfaces were covered by a layer of gold that has relatively high reflectivity at the wavelength range that is 8-20 nm up to an incident angle of around 10 degrees.…”
Section: Lobster Eye Laboratory Modificationsmentioning
confidence: 99%
“…The ellipsoidal surfaces are covered by a layer of gold that has relatively high reflectivity at the wavelength range between 8-20 nm up to about 10 degrees of an incidence angle. In the literature such system is called as "lobster eye" [15]. The optical scheme of the system is shown in Fig.…”
Section: Euv Optical Systemsmentioning
confidence: 99%
“…In the literature such system is called as "lobster eye". 14 The optical scheme of the system is shown in Fig. 7 and the system is presented in Fig.…”
Section: Experiments With the Use Of Euv Opticsmentioning
confidence: 99%