Multi‐Hierarchical Microstructures Boosted Linearity of Flexible Capacitive Pressure Sensor

Huang, Jingxia; Tang, Xiaobin; Wang, Feng; Wang, Zehuan; Niu, Yujuan; Hong, Wang

doi:10.1002/adem.202101767

Cited by 15 publications

(12 citation statements)

References 36 publications

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“…As illustrated in Figure c, the sensitivity and range of the pressure sensor of this study are compared with the reported capacitive sensors, − and the data show that the performance of this work is outstanding. Moreover, Table S1 (Supporting Information) shows a detailed parameter comparison of this study with the flexible sensor concerning sensitivity and pressure sensing range.…”

Section: Resultsmentioning

confidence: 87%

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Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D Printing

Hong,

Guo,

Zhang

et al. 2023

ACS Appl. Mater. Interfaces

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Flexible pressure sensors can be used in human−computer interaction and wearable electronic devices, but one main challenge is to fabricate capacitive sensors with a wide pressure range and high sensitivity. Here, we designed a capacitive pressure sensor based on a bionic cheetah leg microstructure, validated the benefits of the bionic microstructure design, and optimized the structural feature parameters using 3D printing technology. The pressure sensor inspired by the cheetah leg shape has a high sensitivity (0.75 kPa −1 ), a wide linear sensing range (0−280 kPa), a fast response time of roughly 80 ms, and outstanding durability (24,000 cycles). Furthermore, the sensor can recognize a finger-operated mouse, monitor human motion, and transmit Morse code information. This work demonstrates that bionic capacitive pressure sensors hold considerable promise for use in wearable devices.

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Section: Resultsmentioning

confidence: 87%

“…(b) Capacitive response of the sensor at different rates (40, 80, and 160 mm/min). (c) Sensitivity and range of the capacitive pressure sensor for this work compared with existing studies. − (d) Durability test of the capacitive pressure sensor for 24,000 cycles.…”

Section: Resultsmentioning

confidence: 99%

Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D Printing

Hong,

Guo,

Zhang

et al. 2023

ACS Appl. Mater. Interfaces

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show abstract

“…The linear response of the realized sensors, as observed from the reported capacitive flexible tactile sensors, can be classified into three main categories: 1) introducing microstructures in the dielectric layer, 2) using a percolative elastomeric composite as the dielectric layer, and 3) designing microstructured elastic electrodes as the sensitive layer. In the case of the first strategy sensors, [18,[20][21][22][23][24][25][26] the introduction of microstructures such as gradient micro-dome architecture, [18] multi-hierarchical microstructures, [23] and foam structures, [24][25][26] has been extensively investigated to enable persistent deformation of the dielectric layer under varying pressures, consequently improving the linearity of tactile sensors. The sensors based on the second strategy compensate for the reduced sensitivity caused by mechanical saturation by increasing the dielectric constant to enhance the linearity of the sensor.…”

Section: Doi: 101002/admt202300901mentioning

confidence: 99%

“…Moreover, a comparative evaluation of the proposed sensor with other reported capacitive sensors with linear response was performed, focusing on sensitivity and linear range. [18,[20][21][22][23][24][25][26][27][28][29][30][31][32][33][34][35][36] The results of the comparison are shown in Figure 3h and Table S2 (Supporting Information). The majority of the reported sensors have either low sensitivity or narrow linear sensing range.…”

Section: Sensing Properties Of the Tactile Sensormentioning

confidence: 99%

Cone‐Shaped Electrodes for Capacitive Tactile Sensors with High Sensitivity and Broad Linearity Range

Chen,

Zheng,

et al. 2023

Adv Materials Technologies

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Flexible tactile sensors with high sensitivity typically suffer from a dramatically reduces pressure resolution with increasing pressure, resulting in narrow linear ranges and limited application scenarios. Herein, a capacitive tactile sensor based on cone‐shaped electrodes (CSE) that can maintain high sensitivity over a broad linearity range is proposed. The linear response comes from the novel sensing mechanism based on the change in the facing electrode area and the rational design of the conical architecture. Finite element analysis (FEA) confirms that the interfacial contact area between the elastic electrodes and the dielectric layer can respond linearly to pressure over a broad spectrum. Based on this strategy, the fabricated sensors perform a high sensitivity (0.23 kPa−1) and superior linearity (R2 = 0.999) across a wide pressure range of up to 130 kPa. The sensors demonstrate several key features, such as good repeatability, fast response speed, low detection limit, and high durability. These attributes enable the successful use of the sensors for monitoring artery pulses and providing weighting capabilities to robots, showing promising potential for applications in daily health monitoring and human‐machine interaction.

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“…[5][6][7] Flexible pressure sensors have many potential applications in wearable electronics, robotics, health monitoring, energy harvesters, and more. According to the pressure-sensing principle, flexible pressure sensors can be divided into capacitive, [8][9][10] resistive, [11][12][13] and piezoelectric. [14][15][16] Compared with the first two, piezoelectric pressure sensors can passively generate piezoelectric potential without external excitation power and thus can be easily fabricated into wearable devices.…”

mentioning

confidence: 99%

Self‐Powered Rapid Response Flexible Pressure Sensor for Wearable Application

et al. 2023

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Flexible pressure sensors have attracted a lot of attention in fields such as medicine and healthcare due to their ease of making wearable devices. However, the development of flexible pressure sensors is facing the challenges of a complex manufacturing process and high cost. Herein, a zinc oxide (ZnO) piezoelectric film flexible pressure sensor with a 3 × 3 sensor array presented through an extremely simple and ultralow‐cost fabrication process is reported. The 3 × 3 sensor array in series and again, in parallel. The output voltage of the 3 × 3 sensor array is significantly higher compared to the original thin‐film piezoelectric sensors at the same film thickness. The ZnO flexible pressure sensor shows good linear sensitivity and high durability over 4000 cycles of loading in the test range of 0–14 N. The response and recovery times tend to decrease as the dynamic pressure increases in the experimental range. Furthermore, a high‐precision dynamic force calibration system through a comparison between the open‐loop and closed‐loop strategies used in the dynamic force calibration experiments that are performed is presented. Potential applications of the sensor are demonstrated, including elbow flexure and finger tapping. The sensor also shows the ease of massive fabrication.

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Multi‐Hierarchical Microstructures Boosted Linearity of Flexible Capacitive Pressure Sensor

Abstract: The ORCID identification number(s) for the author(s) of this article can be found under https://doi.org/10.1002/adem.202101767.

Cited by 15 publications

References 36 publications

Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D Printing

Flexible Capacitive Pressure Sensor with High Sensitivity and Wide Range Based on a Cheetah Leg Structure via 3D Printing

Cone‐Shaped Electrodes for Capacitive Tactile Sensors with High Sensitivity and Broad Linearity Range

Self‐Powered Rapid Response Flexible Pressure Sensor for Wearable Application

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