Multi Kilovolt Lithium Niobate Pyroelectric Cantilever Switched Power Supply

Ni, Di; Vinayakumar, K. B.; Pinrod, Visarute; Lal, Amit

doi:10.1109/memsys.2019.8870799

Cited by 12 publications

(6 citation statements)

References 4 publications

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“…In this work, we demonstrate distributed pyroelectric voltage generation and actuation with fluid-mediated heating and cooling, which serves as an alternative to the resistive heating approach reported previously [14], [15]. This system provides capabilities for scavenging the broadly existing thermal energy in the environment and converting it to electricity, and enabling untethered microrobot to operate without the need for battery recharging.…”

Section: Introductionmentioning

confidence: 94%

“…As a result, a pyroelectrically-generated voltage is built across the crystal surfaces. One of the most widely used pyroelectric materials, lithium niobate (LiNbO3, or LN), has been demonstrated for kilovolts voltage generation within a small volume of 0.2 cm 3 with a simple architecture consisting of only three parts: a heater, a pyroelectric crystal, and a regulating switch [14]- [16]. Resistive heating in these systems utilizes electrical energy and can ideally be replaced by using ambient thermal energy.…”

Section: Introductionmentioning

confidence: 99%

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Kilovolt Pyroelectric Voltage Generation and Electrostatic Actuation With Fluidic Heating

Ni,

Gund,

Ivy

et al. 2022

2022 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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Integrated micro power generators are crucial components for micro robotic platforms to demonstrate untethered operation and to achieve autonomy. Current micro robotic electrostatic actuators typically require hundreds to thousands of voltages to output sufficient work. Pyroelectricity is one such source of high voltages that can be scaled to small form factors. This paper demonstrates a distributed pyroelectric high voltage generation mechanism to power kV actuators using alternating exposure of crystals to hot and cold water (30 0 C to 90 0 C water temperature). Using this fluidic temperature control, a pyroelectrically generated voltage of 2470 V was delivered to a 2 pF storage capacitor yielding a 6.10 µJ stored energy. A maximum energy of 17.46 µJ was delivered to a 47 pF capacitor at 861 V. The recirculating water can be used to heat a distributed array of converters to generate electricity in distant robotic actuator sections. The development of this distributed system would enable untethered micro-robot to be operated with a flexible body and free of battery recharging, which advances its applications in the real world.

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Section: Introductionmentioning

confidence: 94%

Section: Introductionmentioning

confidence: 99%

Kilovolt Pyroelectric Voltage Generation and Electrostatic Actuation With Fluidic Heating

Ni,

Gund,

Ivy

et al. 2022

2022 Solid-State, Actuators, and Microsystems Workshop Technical Digest

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“…Pyroelectric power generation: Pyroelectric crystals can generate electricity with a change in temperature owing to the net change in polarization of the crystal units [ 100 ]. Therefore, it can be an ideal high-voltage source for MEMS/NEMS devices.…”

Section: Reviewmentioning

confidence: 99%

“…A pyroelectric high-voltage generator (PHVG) system can produce voltages up to several kilovolts, which is an important power supply system for microscale robotics. Ni et al [ 100 ] proposed a PHVG system composed of lithium niobate and a PZT cantilever switch, as shown in Figure 13 . Lithium niobate can generate voltages with the help of a single-chip microcomputer containing heating and cooling functions.…”

Section: Reviewmentioning

confidence: 99%

“…When the voltage exceeds the PZT cantilever switch pull-in voltage, the switch will be closed to complete the actuator task. In 2020, the authors [ 100 ] prepared a high-voltage source with 1.03 kV output voltage using 3D printed conductive polylactic acid polymer. In 2021, they [ 101 ] integrated a lithium niobate crystal, a piezoelectric cantilever switch, and a capacitive load into a single printed circuit board (PCB).…”

Section: Reviewmentioning

confidence: 99%

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Electrostatic pull-in application in flexible devices: A review

Cai¹,

Fang²,

Fang³

et al. 2022

Beilstein J. Nanotechnol.

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The electrostatic pull-in effect is a common phenomenon and a key parameter in the design of microscale and nanoscale devices. Flexible electronic devices based on the pull-in effect have attracted increasing attention due to their unique ductility. This review summarizes nanoelectromechanical switches made by flexible materials and classifies and discusses their applications in, among others, radio frequency systems, microfluidic systems, and electrostatic discharge protection. It is supposed to give researchers a more comprehensive understanding of the pull-in phenomenon and the development of its applications. Also, the review is meant to provide a reference for engineers to design and optimize devices.

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