Multi-layer concentric ring differential capacitance displacement sensor

Fan, Wei; Chen, Mei; Jin, Huaxue; Yin, Wang

doi:10.1016/j.measurement.2019.01.012

Cited by 9 publications

(1 citation statement)

References 2 publications

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“…On the other hand, laser triangulation [15], optical levers [16], grating displacement measurement [17], fiber displacement measurement [18], and laser interferometry [19] belong to the optical displacement measurement methods. The capacitance measurement method can achieve high measurement resolution, but its range is shorter, generally less than 1 mm [20]. The measurement accuracy of the inductance measurement method can be up to ±0.1 mm, but it has a poor dynamic response and the structure is more sophisticated [21].…”

Section: Introductionmentioning

confidence: 99%

Displacement Measurement Method Based on the Rotating Paraboloid Array

Zhang

et al. 2019

Applied Sciences

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Using an optical freeform surface to realize the precision measurement of displacement has become a research focus in the present day. However, the measurement range of this method is limited by the size of the freeform surface processed. In order to overcome this difficulty, this paper presents a two-dimensional displacement measurement system with a large range, which is composed of a slope sensor and a rotating paraboloid array. The slope sensor utilizes the optical structure of an autocollimator with minor optimization, and the rotating paraboloid array expands the measurement range of the system in a discrete manner. The experimental results showed that the optimized optical system enhanced the measurement accuracy to ±0.4 μm within the range of 1500 μm and the overall measurement error was approximately ±2 μm when measured within the range of 450 mm. The developed measurement system has potential applicability for detection of errors, such as the position error and straightness error of multi-axis systems.

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Section: Introductionmentioning

confidence: 99%

Displacement Measurement Method Based on the Rotating Paraboloid Array

Zhang

et al. 2019

Applied Sciences

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Improvement study of modal analysis for offshore structures based on reconstructed displacements

Gao

Liu

Jiang

2021

Applied Ocean Research

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Comparison study of high-sensitivity area-changed capacitive displacement transducers with low-impedance and high-impedance readout circuits

Wang

Wang³

et al. 2022

Review of Scientific Instruments

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Area-changed capacitive displacement transducers (CDTs) are widely used in the high-precision displacement measurement due to their high accuracy and large dynamic range. The preamplifier circuit is used to convert the capacitance variation signal into voltage, which requires low noise and is significant for the high-sensitivity area-changed CDTs. Current CDT preamplifiers are mainly categorized as the low-impedance preamplifier and the high-impedance preamplifier; however, their characteristics and application scopes have not been systematically compared. This paper builds comprehensive models of the low-impedance and the high-impedance preamplifiers. Then, three-electrode configurations with different electrode separations and gaps are designed to carry out displacement variation experiments with low-impedance and high-impedance readout circuits, respectively. The results show that the sensitivity decrease caused by the gap change with the high-impedance preamplifier is 70%, while the counterpart of the low-impedance preamplifier is 85%. When the gap is 0.1 mm and the width-to-separation ratio varies from 1:1 to 5:1, the sensitivity of the CDT based on the low-impedance preamplifier is increased by 64%, while the counterpart with the high-impedance preamplifier is increased by 22%. Hence, this paper gives the universal guiding rules of preamplification circuit selections for different CDT electrode configurations and application requirements. For a capacitive sensor design with large and unavoidable parasitic capacitance, the low-impedance preamplifier and a CDT with a large electrode width-to-separation ratio match best. For a capacitive sensor design requiring both a large sensitivity and good robustness to out-of-plane interferences, the high-impedance preamplifier and a CDT with a small electrode width-to-separation ratio match best.

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Multi-layer concentric ring differential capacitance displacement sensor

Cited by 9 publications

References 2 publications

Displacement Measurement Method Based on the Rotating Paraboloid Array

Displacement Measurement Method Based on the Rotating Paraboloid Array

Improvement study of modal analysis for offshore structures based on reconstructed displacements

Comparison study of high-sensitivity area-changed capacitive displacement transducers with low-impedance and high-impedance readout circuits

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