Multi-layered [Au/Si₃N₄/SiO₂] thermal actuator realization using metal passivated TMAH micro-machining

Abstract

This paper presents the design and fabrication of thermally actuated multi-layered microactuator for out of plane actuation application. Multi-layered actuators are fabricated using ammonium persulfate based TMAH (Tetra-Methyl-Ammonium-Hydroxide) etching with metal passivation. Multi-layered [Au/Si 3 N 4 /SiO 2 ] microactuators with straight and cross-heaters are characterized using the I-V measurement tool. Temperature across actuator was similar to simulated results. Gold as an upper layer of a microactuator fully protected during the release process. Fundamental mode or resonant frequency of fabricated multi-layered microactuator measured by laser Doppler vibrometer (LDV) which observed around 20 KHz.