Multi-peak structure of the ion current in laser produced plasma

The transient target current is used to characterize the aluminum laser produced plasma for various fluences and target external polarizations. A double peak structure of the electronic part was experimentally observed, as consequence of the existence of non-Maxwellian electron distribution through the hot and cold electrons. Applying an external voltage on the target, the ionic part becomes oscillatory, with plasma ion frequency. Assuming that particle motions take place on continuous and non-differentiable curves, a fractal hydrodynamic model of plasma expansion is built. In such conjecture, the analytical solutions and numerical simulations allow a reasonable interpretation of our experimental results.

show abstract

“…We note that similar numerical results were obtained in ref. 25 for a cylindrical symmetry, but assuming the adiabatic expansion.…”

Section: Role Of Fractal Potential In the Hydrodynamic Behaviormentioning

confidence: 99%

Characterization of Aluminum Laser Produced Plasma by Target Current Measurements

Nica

Agop

Gurlui

et al. 2012

Jpn. J. Appl. Phys.

View full text Add to dashboard Cite

show abstract

“…By supposing that the charged particles' movements take place on continuous but nondifferentiable curves (fractal curves) [6], the fractal hydrodynamic equations in the normalized spatiotemporal coordinates system (τ, ξ, η) for the normalized ion density field N and the speed field (V ξ , V η ) take the form [7], [8] ∂ ∂τ…”

mentioning

confidence: 99%

Experimental and Modeling Results on Multiple Double Layers in Low-Temperature Discharge Plasma

Dimitriu

Aflori²,

Ivan

et al. 2011

IEEE Trans. Plasma Sci.

View full text Add to dashboard Cite

Multiple double layers were experimentally investigated in low-temperature plasma and modeled in the frame of the scale relativity model, based on both the fractal space-time concept and the generalization of Einstein's principle of relativity to scale transformations. The obtained results are in very good agreement, proving the ability of the multiple double layers to locally increase the plasma density and to accelerate the charged particles (electrons and ions). Index Terms-Fractal, multiple double layers, scale relativity.

show abstract

Influence of a laser intensity on EUV brightness and ion speed from a laser-assisted discharge-produced plasma

Sato,

Nagano,

Teramoto

2024

Applied Physics Letters

View full text Add to dashboard Cite

Laser-assisted discharge-produced plasma (LDP) is one of the ways to generate extreme ultraviolet (EUV) light used in the semiconductor manufacturing processes. This light source uses a pulsed laser and a high-current pulsed electrical discharge to make a high-temperature and high-density tin plasma. One of two rotating disk electrodes, of which surfaces are coated by liquid tin (Sn), is irradiated by the laser to produce tin plasma. The plasma propagates from one electrode (cathode) to the other (anode) and ignites an electrical breakdown between the electrodes. The low-inductance circuit connected to the electrodes provides a current of approximately 15 kA and 150 ns to the tin plasma. The plasma implodes due to its own magnetic pressure, and EUV radiation is emitted from the resultant hot and dense plasma. High-speed ions are also emitted from the plasma and limit the lifetime of the mirror used to collect the EUV light. We need to maximize the light emission and minimize the ion emission. The role of the laser is essential in the LDP EUV source not only to ignite the discharge but also to condition the initial plasma. It influences EUV energy, EUV brightness, and emitted ion speed distribution of the plasma. The experiment suggested that laser intensity higher than 25 GW/cm2 produced high EUV brightness and low emitted ion speed.

show abstract

Multi-peak structure of the ion current in laser produced plasma

Cited by 5 publications

References 25 publications

Characterization of Aluminum Laser Produced Plasma by Target Current Measurements

Characterization of Aluminum Laser Produced Plasma by Target Current Measurements

Experimental and Modeling Results on Multiple Double Layers in Low-Temperature Discharge Plasma

Influence of a laser intensity on EUV brightness and ion speed from a laser-assisted discharge-produced plasma

Contact Info

Product

Resources

About