Multi-Point Low-Coherence Optical Probe for Freeform Optical Metrology

Diehl, Damon W.; Cotton, Christopher T.; Ditchman, Christopher J.; Burdick, Nathan E.; Ammenheuser, H.

doi:10.1364/oft.2010.otud3

Cited by 2 publications

(1 citation statement)

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“…6 But CMM is a direct contact measurement method and its accuracy is within tens of microns, which cannot satisfy noncontact and nanoscale demands of freeform surfaces used in the imaging system. [13][14][15] The disadvantage of these scanning methods is that the scanning order must be sequential and the test surface has to be removed during the measurement, which leads to a long time. 7 However, its micron level precision is not sufficient for measuring imaging freeform optics.…”

Section: Introductionmentioning

confidence: 99%

Assessment of optical freeform surface error in tilted-wave-interferometer by combining computer-generated wave method and retrace errors elimination algorithm

et al. 2015

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Downloaded From: http://opticalengineering.spiedigitallibrary.org/ on 08/17/2015 Terms of Use: http://spiedigitallibrary.org/ss/TermsOfUse.aspx Assessment of optical freeform surface error in tilted-wave-interferometer by combining computer-generated wave method and retrace errors elimination algorithm Abstract. As is well-known, optical testing has begun to emerge as a limiting factor in the application of freeform surfaces. In all kinds of published freeform optical metrology, the tilted-wave-interferometer (TWI) is the precise and flexible method for testing a freeform surface as it can compensate the local surface's deviation from its best fit sphere by using a set of tilted waves. In the process of measurement with TWI, accurate assessment of the test surface error from the fringes plays a key role. We present a method for evaluation and characterization of surface aberrations in TWI by combining computer-generated wave technology and a retrace errors elimination algorithm. The feasibility of the method is proved by the simulation and experimental results.

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