Multi-Process Tools for Fabrication, Assembly and Inspection

Abstract

Multi-process tools play an important role in improving productivity and reduce unit cost of products. In this paper, a comprehensive literature survey on multi-process tools is conducted. The objectives of this survey are to (i) understand key business drivers for multi-processing, (ii) learn the existing multi-process tools available in various applications including automotive, pharmaceutical, and electronics, and (iii) identify trends in development of multi-process tooling. The contributions have been made in the following aspects: (i) the scope and definition of multi-process tools are introduced; existing multi-process tools are classified in terms of the nature of multi-processes, the targeted objects, and the applications. (ii) Pros and cons of multi-process tools are discussed and used as criteria to determine some principals in selecting right applications. (iii) Some under-developing areas related to multi-process tools have been identified and the principals of adapting multi-process tools have been determined.