Nanometer composite usually has multilevel structure, and deformation mechanism of its multilevel structure is the hot spot at present. The paper studies deformation mechanism of multilevel structure of CNT film material under tension loading and its influence on film mechanical properties by jointing multiscale experiment methods such as tensile test, digital image correlation, SEM observation, and in situ micro-Raman spectroscopy. The result shows that, during film loading process, the deformation of CNTs inside the film endures elastic elongation and glide successively, with very small axial elongation, which is about 7% of film deformation; the deformation of CNT bundle network structure endures deformation mechanism such as CNT bundle extension, rotation, and glide, and this structure deformation occupies about 93% of film deformation that large structure deformation makes CNT film have good toughness; during film loading process, the formation of CNT bundle long chain and glide mechanism in the chains help to improve film strength and toughness.