2011
DOI: 10.1007/s10836-011-5259-y
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Multi-scale Simulation Methodology for Stress Assessment in 3D IC: Effect of Die Stacking on Device Performance

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Cited by 12 publications
(8 citation statements)
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“…We further note that in the new physics-based EM model, one needs to explicitly consider the residual stresses, σ Res , which can have huge impacts on the nucleation time and thus the failure time of a wire. As a result, it is important to have an accurate estimation of residual stresses and more accurate residual stress can be computed using multi-scale numerical method [13].…”
Section: B Physics-based Em Modelmentioning
confidence: 99%
“…We further note that in the new physics-based EM model, one needs to explicitly consider the residual stresses, σ Res , which can have huge impacts on the nucleation time and thus the failure time of a wire. As a result, it is important to have an accurate estimation of residual stresses and more accurate residual stress can be computed using multi-scale numerical method [13].…”
Section: B Physics-based Em Modelmentioning
confidence: 99%
“…In addition to morphology, stress also affects the growth rates of the interfacial Cu Sn t h ¶ ¶ will slow down according to (10), i.e., the growth of the Cu 6 Sn 5 phase will be slower than that in the stress-free condition. Therefore, the difference in the strain energy of the phases cannot explain the enhanced growth of the interfacial Cu 6 Sn 5 phase under tensile stress as illustrated in Fig.…”
Section: A Effects Of Stress On the Morphology And Growth Rate Of Inmentioning
confidence: 99%
“…Efficient chip/package co-analysis of mechanical stress has been enabled by lateral and vertical linear superposition (LVSI) methods developed by Jung et al [8]. However, high-fidelity predictions of stress distribution across chips and packages are still restricted by the lack of a database of multi-scale and timedependent materials properties [1], [10]. In particular, knowledge of microstructuredependent properties still remains scarce.…”
Section: Introductionmentioning
confidence: 99%
“…Recently, there were reports on the development of the design verification tool for stress assessment in 3D IC chips, as well as for analysis of the layout-induced transistor-totransistor stress variation generated by various strain engineered sources [8][9]. These sources include the contact etch stop layers (CESL), the variety of stress memorization techniques (SMT), epi-silicon-germanium embedded into the source/drain region, as well as the shallow trench isolation regions (STI).…”
Section: Introductionmentioning
confidence: 99%
“…In this paper we report the novel post-placement simulation algorithm and flow developed for reduction in the off-state leakage current of MOSFET devices with aforementioned layout stress analyzer [8][9]. We demonstrate the simulation results obtained on the standard-cell logic block of the 28 nm test-chip and compare them with measurements.…”
Section: Introductionmentioning
confidence: 99%