Multi-sensor Approach for Multivalent Applications in Nanometrology

Manske, Eberhard; Jäger, Gerd

doi:10.5875/ausmt.v2i2.149

Cited by 3 publications

References 2 publications

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Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes

et al. 2021

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The majority of nanopositioning and nanomeasuring machines (NPMMs) are based on three independent linear movements in a Cartesian coordinate system. This in combination with the specific nature of sensors and tools limits the addressable part geometries. An enhancement of an NPMM is introduced by the implementation of rotational movements while keeping the precision in the nanometer range. For this purpose, a parameter-based dynamic evaluation system with quantifiable technological parameters has been set up and employed to identify and assess general solution concepts and adequate substructures. Evaluations taken show high potential for three linear movements of the object in combination with two angular movements of the tool. The influence of the additional rotation systems on the existing structure of NPMMs has been investigated further on. Test series on the repeatability of an NPMM enhanced by a chosen combination of a rotary stage and a goniometer setup are realized. As a result of these test series, the necessity of in situ position determination of the tool became very clear. The tool position is measured in situ in relation to a hemispherical reference mirror by three Fabry–Pérot interferometers. FEA optimization has been used to enhance the overall system structure with regard to reproducibility and long-term stability. Results have been experimentally investigated by use of a retroreflector as a tool and the various laser interferometers of the NPMM. The knowledge gained has been formed into general rules for the verification and optimization of design solutions for multiaxial nanopositioning machines.

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Fundamental Investigations in the Design of Five-Axis Nanopositioning Machines for Measurement and Fabrication Purposes

et al. 2021

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An accurate inner diameter measurement

Sanjid

Chaudhary²,

Yadav

et al. 2020

Review of Scientific Instruments

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The inaccurate deflection behavior of the probing system degrades the performance of the diameter-measuring machines. In this experiment, the probing is improved, applying an autocollimator and an angular positioning datum. We have devised this datum using a liquid wedge. A ring gauge is chosen as a workpiece to evaluate the deflection behavior of the probing system. The improved uncertainty of the probing is found as low as 40 nm. Subsequently, the inner diameter of the ring gauge is measured on this experimental setup. By employing a simulation, we aligned the workpiece. The deflections of the stylus are optimized to achieve zero deflection error at the zenith points. Consequently, the swing of the probe at the zenith points is combined with the rectilinear displacement of the workpiece to estimate the inner diameter. The uncertainty of the measurement of the ring gauge is improved up to 140 nm.

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