Multi-sized planar capacitive pressure sensor with ultra-high sensitivity

Chen, Sicheng; Xin, Shaoshan; Yang, Lei; Guo, Yanjie; Zhang, Weiqiang; Sun, Kun

doi:10.1016/j.nanoen.2021.106178

Cited by 53 publications

(25 citation statements)

References 35 publications

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“…Flexible tactile electronic skin sensors have human-skin-mimicking flexibility and functions, which can be conformally attached to human skin or robotics surface to perceive various stimuli such as pressure, stress, temperature, and so on, showing promising applications in fields of personalized healthcare, human machine interface, and intelligent robotics. − In practical application, pressure perception is of great significance because of its ability to detect various physical motions and biosignals, such as gentle touch, wrist pulse, heartbeat, and respiration rate. − In the past decade, a large number of flexible wearable pressure sensors have been developed, and most of them are based on piezoresistive, , capacitive, ,, piezoelectric, , and triboelectric properties . Among all these sensing principles, capacitive pressure sensors, which are composed of a dielectric elastomeric layer sandwiched between two electrodes and transduce pressure changes into capacitance variation, have been intensively investigated because of their simple structures, low power consumption, and temperature-insensitive features.…”

Section: Introductionmentioning

confidence: 99%

Femtosecond Laser-Induced Supermetalphobicity for Design and Fabrication of Flexible Tactile Electronic Skin Sensor

Yang

et al. 2022

ACS Appl. Mater. Interfaces

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Pursuing flexible tactile electronic skin sensors with superior comprehensive performances is highly desired in practical applications. However, current flexible tactile electronic skin sensors suffer insufficient flexibility and sensitivity, as well as high-cost and lowefficiency in fabrication, and are susceptible to contamination in sensing performances. Here, a highly sensitive all-flexible tactile sensor (AFTS) is presented with capacitive sensing that combines a doubleside micropyramids dielectric layer and a liquid metal (LM) electrode. The design and fabrication of LM-based AFTS are based on supermetalphobicity induced by femtosecond laser. The supermetalphobic micropyramids lead to a high sensitivity up to 2.78 kPa −1 , an ultralow limit of detection of ∼3 Pa, a fast response time of 80 ms, and an excellent durability of cyclic load over 10 000 times. The used femtosecond laser enables programmable, high-efficiency, low-cost, and large-scale fabrication of supermetalphobic double-side micropyramids, which is difficult to implement using conventional techniques. Furthermore, the outer substrates are treated by a femtosecond laser, endowing the AFTS with excellent antifouling performance and stable sensing signals in the highly humid environment. Successful monitoring of human physiological and motion signals demonstrates the potential of our developed AFTS for wearable biomonitoring applications.

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Section: Introductionmentioning

confidence: 99%

Femtosecond Laser-Induced Supermetalphobicity for Design and Fabrication of Flexible Tactile Electronic Skin Sensor

Yang

et al. 2022

ACS Appl. Mater. Interfaces

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“…The pressure sensor can realize the measurement of human touch [ 2 , 3 , 4 ]. Its working principle can be divided into four categories: capacitive [ 5 , 6 , 7 ], piezoresistive [ 8 , 9 , 10 ], piezoelectric [ 11 , 12 , 13 , 14 ], and triboelectronic [ 15 , 16 , 17 , 18 , 19 , 20 ]. Capacitive sensors usually have high sensitivity.…”

Section: Introductionmentioning

confidence: 99%

High Sensitivity and Wide Range Biomimetic Tactile-Pressure Sensor Based on 2D Graphene Film and 3D Graphene Foam

Sha¹,

Lü

Jiang

2022

Micromachines

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Bionic electronic skin is a system that simulates human skin and has multiple perceptions. For pressure sensors, high measurement accuracy and wide measurement range restrict each other, and it is difficult to achieve high measurement accuracy and wide measurement range simultaneously. Therefore, the research and application of bionic tactile-pressure sensors are limited due to the mutual constraints of measurement accuracy and range. In this work, a flexible graphene piezoresistive tactile sensor based on a biomimetic structure that utilizes the piezoresistive properties of graphene was reported. The novel tactile-pressure sensor consists of a 2D graphene film tactile sensor and a 3D graphene foam pressure sensor that could achieve high accuracy and a wide-range measurement simultaneously. The testing results show that the measurement range of this sensor was in two intervals of 0–2 N and 2–40 N. For the 0–2 N measurement range, the sensitivity was 472.2 Ω/kPa, the force resolution was 0.01 N, and the response time was less than 40 ms. For the 2–40 N measurement range, the sensitivity was 5.05 kΩ/kPa, the force resolution was 1 N, and the response time was less than 20 ms. The new sensor can realize high-precision and large-scale force measurements and shows great application value in the field of medical instruments and artificial limbs.

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“…Among these devices, exible pressure sensors play a very important role in health monitoring by detecting blood pressure and heartbeat, which indicate human health conditions [10]. Based on their working mechanism, the pressure sensors generally are categorized into four types; piezoresistive [11][12][13][14][15], capacitive [16,17], piezoelectric [18,19], and triboelectric [20,21] types. Among them, the piezoresistive-type pressure sensors, which employ variations in contact area between electrodes and detect resistance changes under applied pressure, have many advantages such as high sensitivity, simple device structure, and easy read-out circuit [10,11].…”

Section: Introductionmentioning

confidence: 99%

3D-printing-assisted flexible pressure sensor with concentric circles patterns and high sensitivity for health monitoring

2022

Preprint

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In this study, the flexible pressure sensor is fabricated using polydimethylsiloxane (PDMS) with concentric circles pattern (CCP) through a fused deposition modeling (FDM)-type three-dimensional (3D) printer, and poly (3,4-ethylenedioxythiophene): poly(styrenesulfonate) (PEDOT: PSS) as the active layer. Through layer-by-layer additive manufacturing, the CCP surface is generated from a thin cone model with rough surfaces by the FDM-type 3D printer. A novel compression method is employed to convert the cone shape to planar microstructure over glass transition temperature of polylactic acid (PLA) filament. To endow the CCP surface, PDMS is replicated by compressed PLA with conductivity and the PEDOT: PSS is coated by drop-casting. The size of CCPs are controlled by changing printing layer height (PLH), which is one of the 3D printing parameters. Sensitivity enhances as the PLH increases, and the pressure sensor with 0.16-mm PLH exhibits outstanding sensitivity (160 kPa− 1), corresponding linear pressure range (0-0.577 kPa) with good linearity of (R2 = 0.978), compared to other PLHs. This pressure sensor exhibited stable and repeatable operation under various pressures and durability under 4.7 kPa for 2000 cycles. Finally, various health signal motions such as wrist pulse signals, swallowing, and pronunciation of words were demonstrated as an application. These results support the simple fabrication of high sensitive, flexible pressure sensor for human health monitoring.

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Multi-sized planar capacitive pressure sensor with ultra-high sensitivity

Cited by 53 publications

References 35 publications

Femtosecond Laser-Induced Supermetalphobicity for Design and Fabrication of Flexible Tactile Electronic Skin Sensor

Femtosecond Laser-Induced Supermetalphobicity for Design and Fabrication of Flexible Tactile Electronic Skin Sensor

High Sensitivity and Wide Range Biomimetic Tactile-Pressure Sensor Based on 2D Graphene Film and 3D Graphene Foam

3D-printing-assisted flexible pressure sensor with concentric circles patterns and high sensitivity for health monitoring

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