Multiaxis interferometric displacement measurement for local probe microscopy

Lazar, Josef; Hrabina, Jan; Šerý, Mojmı́r; Klapetek, Petr

doi:10.2478/s11534-011-0093-5

Cited by 12 publications

(22 citation statements)

References 27 publications

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“…They measure vertical displacement and pitch and roll angles are evaluated from their differences. Interferometers monitor a single x displacement and y-position is measured by the two which gives the information about the third angle rotation according to the vertical axis (the yaw angle) [27]. The nanopositioning x-y-z stage is a PZT-driven system with 200 µm travel range in both x and y axes and 10 µm range in the vertical z axi loop displace range system…”

Section: Arrangement and Mechanicsmentioning

confidence: 99%

Six-axis interferometric coordinates measurement system for nanometrology

et al. 2014

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We present an overview of approaches to the design of nanometrology coordinates measuring setup with a focus on methodology of nanometrology interferometric techniques and associated problems. The design and development of a nanopositioning system with interferometric multiaxis monitoring and control involved for scanning probe microscopy techniques (primarily atomic force microscopy, AFM) for detection of the sample profile is presented. Coordinate position sensing allows upgrading the imaging microscope techniques up to quantified measuring. Especially imaging techniques in the micro-and nanoworld overcoming the barrier of resolution given by the wavelength of visible light are a suitable basis for design of measuring systems with the best resolution possible. The practical measurement results of active compensation system for positioning angle errors suppression are presented as well as the analysis of overall achievable parameters. The system is being developed in cooperation with the Czech metrology institute and it is intended to operate as a national nanometrology standard combining local probe microscopy techniques and sample position control with traceability to the primary standard of length.

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Section: Arrangement and Mechanicsmentioning

confidence: 99%

Six-axis interferometric coordinates measurement system for nanometrology

et al. 2014

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“…As most of the displacement measurements in industrial as well as fundamental metrology have been performed under atmospheric conditions where refractive index of air fluctuations play a dominant role as the source of uncertainty, there is not always the need to achieve the highest possible level of frequency stability [15,16]. The influence of refractive index of air can be evaluated with uncertainty down to the level of approximately 10 -7 [17].…”

Section: Introductionmentioning

confidence: 99%

Optical frequency references for laser interferometry

et al. 2015

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Optical frequency references for laser standards based on molecular iodine absorption cells represent one of the most used tool for frequency stabilization of lasers operating in a visible spectral range. In the industry oriented laser measurements and similar laser interferometry applications performed at atmospheric conditions, a refractive index of air plays a role of main uncertainty contributor. In these cases there is no need to use technologically complicated and expensive iodine references made of pure fused silica with precise pressure control of absorpbing media. A set of iodine cells made of borosilicate glass was filled with certain amount of absorbing media to define the saturation point of iodine inside. A combination of these two approaches (pyrex material and controlled saturation pressure of iodine) allows us to simplify the laser stabilization setup (there is no need of additional iodine pressure level control) and reduce the overall reference's costs with ensuring of sufficient frequency stability of the system at the same time. Spectral properties of manufactured cells were tested by hyperfine transitions linewidth measurement and comparison with results from traditional fused silica cells was done to investigate the long-term iodine purity inside the references. As the transitions linewidth method shows a very high sensitivity to iodine purity level, this method is proposed to be an alternative approach in investigation of contamination in iodine absorption cells where traditionally used techniques -laser induced fluorescence (LIF) and absolute frequency shifts measurement -can not be used.

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“…Further, linear spectroscopy of molecular iodine is also an often used technique especially in case of interferometry applied at atmospheric conditions, where the influence of refractive index of air plays a dominant role [23][24][25][26][27]. Using this technique in combination with slow thermal tuning of the laser, the achievable frequency stability of frequency doubled Nd:YAG lasers is in the range of 10 -9 for 100 s integration time which is often two orders better than refractive index caused noise [28][29][30]. However, excellent optical frequency stability achieved by these lasers stabilized to molecular iodine vapor by high resolution spectroscopy can be further improved.…”

Section: Introductionmentioning

confidence: 99%

Comparison of Molecular Iodine Spectral Properties at 514.7 and 532 nm Wavelengths

Hrabina

Acef

Burck

et al. 2014

Measurement Science Review

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We present results of investigation and comparison of spectral properties of molecular iodine transitions in the spectral region of 514.7 nm that are suitable for laser frequency stabilization and metrology of length. Eight Doppler-broadened transitions that were not studied in detail before were investigated with the help of frequency doubled Yb-doped fiber laser, and three of the most promising lines were studied in detail with prospect of using them in frequency stabilization of new laser standards. The spectral properties of hyperfine components (linewidths, signal-to-noise ratio) were compared with transitions that are well known and traditionally used for stabilization of frequency doubled Nd:YAG laser at the 532 nm region with the same molecular iodine absorption. The external frequency doubling arrangement with waveguide crystal and the Yb-doped fiber laser is also briefly described together with the observed effect of laser aging.

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Multiaxis interferometric displacement measurement for local probe microscopy

Cited by 12 publications

References 27 publications

Six-axis interferometric coordinates measurement system for nanometrology

Six-axis interferometric coordinates measurement system for nanometrology

Optical frequency references for laser interferometry

Comparison of Molecular Iodine Spectral Properties at 514.7 and 532 nm Wavelengths

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