“…Since the advent of integrated circuits (ICs) in the 1960s, IC components have been developing toward miniaturization, which can cause interconnection signal delay (RC delay), power dissipation, and crosstalk noise. − The Semiconductor Industry Association believes that in order to take this challenge, the development of high-performance low- k ( k < 2.5) and ultra-low k ( k < 1.9) materials is urgently necessary. , Benzocyclobutene (BCB) resins, an important class of low- k materials, have attracted much attention for many years. BCB polymers exhibit high thermostability, good mechanical properties, and a low dielectric constant. − Therefore, benzocyclobutene polymers have been widely used in electronic and microelectronic industries. − “Cyclotene” (DVS-BCB) developed by DOW Chemical Company has been successfully commercialized and utilized in microelectronics. , With the continuous miniaturization of ICs components, the k value of DVS-BCB resin (2.65) cannot meet the performance requirements. ,,, Theoretically, two main strategies are usually used to decrease the k value of materials: (1) decreasing the polarizability by introducing low polarity bonds such as C–H, C–C, C–Si, and so on, and (2) introducing pores to decrease the density of materials. , In particular, the introduction of pores can reduce the k value of materials below 2.0 because the k value of air is approximately 1. ,, However, excessive pores can decrease the mechanical properties and water resistance of materials, thereby, increasing the k value. ,, It is significant to develop a new system to decrease the k value and ensure the material with good hydrophobicity and mechanical properties. Notably, the k value of materials can be reduced by introducing bulky groups into the polymer, such as aromatic ring, adamantane, polyhedral oligomeric silsesquioxane (POSS), and so on. − This is because introducing bulky groups can increase the free volume of polymers that weakens the polar interaction between molecular chains, reducing the dielectric constant. ,, Free volume is essentially different from the porous structure, which is a subnanometer-scale space.…”