Multifidelity modeling and comparative analysis of electrically coupled microbeams under squeeze-film damping effect

Najar, Fehmi; Ghommem, Mehdi; Abdelkefi, Abdessattar

doi:10.1007/s11071-019-04928-4

Cited by 13 publications

(3 citation statements)

References 27 publications

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“…The main difficulty of the theoretical modelling of these movable structures is the accurate prediction of the nonlinear vibration of these resonators as driven electrostatically, which is crucial for various potential applications [29][30][31]. One of the key factors to be considered in modelling MEMS resonators is damping, which can be intrinsic, such as thermoelastic [32][33][34][35], or extrinsic, such as squeeze film [33,[36][37][38][39][40][41][42][43][44] damping. Damping lowers the quality factor of MEMS resonators affecting adversely their performance, making the quality factor a key parameter design for a wide range of applications such as timing and sensing.…”

Section: Introductionmentioning

confidence: 99%

Nonlinear damping in micromachined bridge resonators

et al. 2022

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This study presents a thorough theoretical and experimental investigation on the nonlinear damping of in-plane micromachined electromechanical resonators. More specifically, experiments are conducted on an electrically actuated bridge resonator, and the primary resonance response of the system is obtained at various AC and DC voltages. A nonlinear theoretical model is developed using the Euler–Bernoulli beam theory while accounting for the geometric, electrostatic (including fringing field effect), and damping nonlinearities. Two damping models are considered in the theoretical model: the Kelvin–Voigt model, which for this system is a nonlinear damping model due to the presence of geometric nonlinearities. The second damping model consists of linear, quadratic, and cubic damping terms. A high-dimensional discretisation is performed, and the nonlinear dynamics of the resonator are examined in detail in the primary resonance regime by constructing the frequency response diagrams at various AC and DC voltages. Thorough comparisons are conducted between the experimental data and the theoretical results for different damping conditions. It is shown that the microresonator displays strong nonlinear damping. Detailed calibration procedures for the nonlinear damping models are proposed, and the advantages and disadvantages of each nonlinear damping model are discussed.

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Section: Introductionmentioning

confidence: 99%

Nonlinear damping in micromachined bridge resonators

et al. 2022

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“…As the probe gradually moves down until it approaches the surface of the sample, the interaction mechanism between the probe and the sample also needs to be considered. Based on Reynolds equation, the response function of cantilever under the influence of the squeeze film damping is given, 18–20 and the actions of the squeeze film damping under different parameters are discussed 21–23 . In ambient air conditions, one kind of dissipation energy due to adhesion hysteresis comes from the capillary forces between the AFM tip and the sample 24,25 .…”

Section: Introductionmentioning

confidence: 99%

Theoretical model and experimental study on environmental dissipation mechanism of tapping mode atomic force microscope

Wang

Liu

Wei

et al. 2021

Journal of Microscopy

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The phase information reflects the energy dissipation of the probe and sample interactions in tapping mode atomic force microscopes (TM AFMs). In this paper, we use the method of tune test in TM AFM to study the contribution of external environment to energy dissipation by changing the probe position and ambient humidity. Finally, the theoretical and experimental quality factors of air viscous damping, squeeze film damping and liquid bridge force are obtained to characterise energy dissipation. The analytically predicted values of the model established on squeeze film damping, viscous damping and liquid bridge force comparing to the experimental results in this paper is rational. And the comparative analysis results show that the main mechanism of energy dissipation is different at different probe positions and different relative humidness. This result is of great significance for understanding the mechanism of phase imaging experimentally and theoretically.

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“…Air damping has attracted a lot of attention because it could cause the energy dissipation in electron devices, especially in microelectromechanical systems (MEMS) devices [1–3]. Squeeze film air damping is one of the most important air damping, and many researchers found that squeeze film air damping could have a significant effect on the dynamic characteristics of electron devices [4, 5].…”

Section: Introductionmentioning

confidence: 99%