Multifunctional MEMS Sensors for Measuring Force and Acceleration Dependent on Graphene-Induced Nonradiative Transitions

Abstract

The investigation focuses on a microelectromechanical system (MEMS) force-acceleration sensor utilizing grapheneinduced nonradiative transitions. The research results indicate that the sensor's performance is highly sensitive to distance, enabling remarkable performance while downsizing the MEMS sensor. As a force sensor, it has a measurement range of 0−88 nN and a sensitivity of −1.004%/nN. In terms of acceleration sensing, it boasts a linear measurement range of ±50 g with an optical system sensitivity of 1.131%/nm, a mechanical sensitivity of 1.94 nm/g, low cross-axis sensitivity at 0.014%, and a high accelerometer sensitivity of up to −2.192%/g. Moreover, the sensor can perform long-distance optical charging and detection without the need for integrated batteries and antennas, making it highly promising for applications in various industries such as microintelligent devices, wearables, biomedicine, the Internet of Things, autonomous driving, and aerospace.