Multilayer Inorganic Electrets with SiO2 and Si3N4

Abstract

The physics and basic properties of electrets are discussed, namely, what happens during corona charging of dielectrics, why the surface potential and trapped charge show certain limits, where the trapped charge is stored, why and how the charge is released from traps at high temperatures. The experiments have been conducted on single-layer SiO 2 and Si 3 N 4 and on multilayer combination of these materials. A strong lateral mobility of charge trapped near the SiO 2 /Si 3 N 4 interface was observed at elevated temperatures. The positively and negatively charged electrets are compared to each other. The experiments on charge retention at elevated temperatures have shown the studied electrets are suitable for devices working at temperatures of up to 200-300 • C.

Charge Retention in a Patterned ${\rm SiO}_{2}/{\rm Si}_{3}{\rm N}_{4}$ Electret

“…above 400°C. It was shown in [10] that this in-plane charge retrapping is observed on the scale of centimeters if anneal at 450°C continues for hours. Fig.…”