1995
DOI: 10.1016/0257-8972(95)02555-3
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Multilayer PVD coatings for wear protection

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Cited by 462 publications
(148 citation statements)
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“…In particular, metal-ceramic multilayers show an attractive combination of electrical [3,4], magnetic [5][6][7], optical [8][9][10] and mechanical [11] properties, which are appealing for a number of engineering applications. For instance, metal-ceramic nanolaminates offer a good combination of hardness and toughness, leading to excellent wear resistance for protective coatings [11,12]. In electronic applications, metal (Cu, Al (-ceramic (Si0 2 , CDO ) multilayers have been widely used in advanced packaging technology for more than 30 years.…”
Section: Introductionmentioning
confidence: 99%
“…In particular, metal-ceramic multilayers show an attractive combination of electrical [3,4], magnetic [5][6][7], optical [8][9][10] and mechanical [11] properties, which are appealing for a number of engineering applications. For instance, metal-ceramic nanolaminates offer a good combination of hardness and toughness, leading to excellent wear resistance for protective coatings [11,12]. In electronic applications, metal (Cu, Al (-ceramic (Si0 2 , CDO ) multilayers have been widely used in advanced packaging technology for more than 30 years.…”
Section: Introductionmentioning
confidence: 99%
“…6, due to anisotropic growth conditions. For many applications, this is used advantageously to create multilayers [7], where the large number of interfaces contributes to enhanced mechanical properties [8]. However, in most cases, the layering is unintentional and not even recognized.…”
Section: Introductionmentioning
confidence: 99%
“…Multilayer coatings have a wide range of applications being used as X-ray mirrors, monochromators, corrosion and erosion protections and diffusion barriers [1±5]. More recently, multilayer coatings have been used for mechanical application, namely to improve the wear resistance of coated components [3,6,7]. It seems that the wear resistance results from a speci®c favourable combination of hardness and toughness, which is dif®cult to obtain with a single coating [8].…”
Section: Introductionmentioning
confidence: 99%