2015
DOI: 10.1109/jlt.2015.2392784
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Multilayer Silicon Nitride-on-Silicon Integrated Photonic Platforms and Devices

Abstract: We review and present additional results from our work on multilayer silicon nitride (SiN) on silicon-on-insulator (SOI) integrated photonic platforms over the telecommunication wavelength bands near 1550 and 1310 nm. SiN-on-SOI platforms open the possibility for passive optical functionalities implemented in the SiN layer to be combined with active functionalities in the SOI. SiN layers can be integrated onto SOI using a front-end or back-end of line integration process flow. These photonic platforms support … Show more

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Cited by 212 publications
(102 citation statements)
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“…[195,196] There have been some demonstrations of silicon photonic technologies with multiple waveguide planes, where some of the topological constraints are alleviated. [197,198] In such an architecture routing becomes at the same time easier (fewer problems with crossings) and more difficult (more degrees of freedom and the need to manage the penalties of inter-layer transitions).…”
Section: Photonic Routingmentioning
confidence: 99%
“…[195,196] There have been some demonstrations of silicon photonic technologies with multiple waveguide planes, where some of the topological constraints are alleviated. [197,198] In such an architecture routing becomes at the same time easier (fewer problems with crossings) and more difficult (more degrees of freedom and the need to manage the penalties of inter-layer transitions).…”
Section: Photonic Routingmentioning
confidence: 99%
“…In the last decades, research into photonic integrated circuits (PICs) has intensified and PICs are now emerging as a mature and industrial platform, enabling the integration of active and passive optical components on a single chip in a scalable manner. Prominent PIC platforms, which are being developed to industrial scale, are silicon on insulator (SOI), [1][2][3][4] silicon nitride (SiN), [5][6][7] and indium phosphate (InP) [8][9][10] among others. One DOI: 10.1002/lpor.201700256 of the original PIC platforms that enabled optical fiber communications is lithium niobate (LiNbO 3 ).…”
Section: Introductionmentioning
confidence: 99%
“…Combinations of these technologies can be realistically considered, too, e.g. heterogeneous silicon indium phosphide integration, also known as the hybrid silicon platform [8]; the integration of silicon with silicon nitride [9,10]; or even silicon, silicon nitride, and indium phosphide all together in a single process flow [11,12]. For illustrative purposes, an example of a typical silicon photonic technology is shown in Figure 2.…”
Section: Photonic Integration Technology and Its Advantages For Beammentioning
confidence: 99%