2010
DOI: 10.3103/s1062873810010120
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Multilayer thin-film filters of extreme ultraviolet and soft X-ray spectral regions

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Cited by 14 publications
(11 citation statements)
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“…The pulse energy and absolute number of photons in the soft x-ray spectra were estimated using the calculated mirror reflectivity which agreed with measurements at several wavelengths 30 , measured filters transmission 31 , calculated transmission grating efficiency 32 , 33 , and CCD efficiency and gain provided by the manufacturer. In this way the Spectrograph throughput, Supplementary Figure 4a , was obtained.…”
Section: The Biser Conceptsupporting
confidence: 53%
See 1 more Smart Citation
“…The pulse energy and absolute number of photons in the soft x-ray spectra were estimated using the calculated mirror reflectivity which agreed with measurements at several wavelengths 30 , measured filters transmission 31 , calculated transmission grating efficiency 32 , 33 , and CCD efficiency and gain provided by the manufacturer. In this way the Spectrograph throughput, Supplementary Figure 4a , was obtained.…”
Section: The Biser Conceptsupporting
confidence: 53%
“…As no single material can afford efficient normal-incidence reflection in the soft x-ray spectral region, we used an aperiodic Mo/Si multilayer coating 56 designed for approximately uniform 11% reflectivity in the 12.4 to 20 nm spectral region 30 , corresponding to the photon energy range of 60 to 100 eV. To avoid detector exposure from laser and out-of-band plasma radiation, we used two free-standing optical blocking filters, specifically two 0.2 µm thick multilayer Zr/Al filters 31 in the case of the Spectrograph and 0.1 µm Zr and 0.2 µm Zr/Al filters in the case of the Imager. A 0.4 T, 5 cm long magnet deflected charged particles away from the sensors.…”
Section: Methodsmentioning
confidence: 99%
“…In some experimental campaigns, the transmitted laser beam footprint was measured with the Teflon screen and optical charge-coupled device (CCD); the X-rays passed to the spectrograph through the aperture made in the screen. The X-ray spectra were recorded in all the experiments in the forward direction with a flat-field grazing-incidence spectrograph comprised of a toroidal mirror, slit, optical blocking filters [13], flat-field varied-line-space spherical grating [14] and back-illuminated charge-coupled device (CCD). The spectrograph is described in more detail in [2].…”
Section: Methodsmentioning
confidence: 99%
“…with dry-reactive ion etching (Haga et al, 1998(Haga et al, , 2000Takenaka et al, 2005;Andreev et al, 2005;MacDonald et al, 2008MacDonald et al, , 2009. Another method to make freestanding ML-BSs is by using the photoresist or another sublayer that is dissolved and the ML is subsequently lifted off and remounted onto a frame (Kortright et al, 1992;Kimura et al, 2005;Volodin et al, 2010;Nomura et al, 1992).…”
Section: Current State Of Ml-bs Technologymentioning
confidence: 99%
“…Such beam splitters based on multilayer-coated membranes (ML-BSs) are required for, for example, pump-probe experiments, parallel user operation at FELs, autocorrelation measurements to determine the time structure of FEL pulses (Mitzner et al, 2008(Mitzner et al, , 2009), online wavefront diagnostics (Zeitoun et al, 2004), ellipsometry (Kortright et al, 1992;Kimura et al, 2005), polarimetry (Schä fers et al, 1999), interferometry (Da Silva et al, 1995a;Smith et al, 2003), transmission filters (Volodin et al, 2010), Fourier transform spectroscopy (de Oliveira et al, 2011) and as output couplers for laser cavities (Stearns et al, 1986;Ceglio, 1989).…”
Section: Introductionmentioning
confidence: 99%