Multilayer transmission polarizers in the soft X-ray region

Derossi, A; Lama, F.; Piacentini, M.; Zema, N.

doi:10.1088/0963-9659/3/4/027

Pure Appl. Opt.

1994

DOI: 10.1088/0963-9659/3/4/027

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Multilayer transmission polarizers in the soft X-ray region

A Derossi¹,

F. Lama²,

M. Piacentini³

et al.

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2007

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Broadband Mo∕Si multilayer transmission phase retarders for the extreme ultraviolet

Wang

Zhu

et al. 2007

Applied Physics Letters

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Experimental results on aperiodic broadband transmission molybdenum/silicon multilayer phase retarders for the extreme ultraviolet range are presented. The broadband phase retarders were designed using a numerical method and made using direct current magnetron sputtering on silicon nitride membrane. The polarization properties of these aperiodic transmission phase retarders have been investigated using the soft x-ray polarimeter at BESSY-II. The measured phase shift was about 42° in the wavelength range of 13.8–15.5nm, and the corresponding s-component transmission (Ts) decreased from 6% to 2% with increasing wavelength.

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Broadband Mo∕Si multilayer transmission phase retarders for the extreme ultraviolet

Wang

Zhu

et al. 2007

Applied Physics Letters

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show abstract

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Multilayer transmission polarizers in the soft X-ray region

Cited by 1 publication

References 17 publications

Broadband Mo∕Si multilayer transmission phase retarders for the extreme ultraviolet

Broadband Mo∕Si multilayer transmission phase retarders for the extreme ultraviolet

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