2014
DOI: 10.2528/pierb13123101
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Multilayered Superlenses Containing CSBR or Active Medium for Subwavelength Photolithography

Abstract: Abstract-The characteristics of periodic multilayered near-field superlenses are analyzed and optimized, using the dispersion relation derived from an effective medium theory and the transfer function in the spectral domain. The k z -k x and k z -k x contours are used to explain and predict the spectral width, amplitude and phase of the transfer function. Superlenses containing CsBr or active layers are proposed to reduce image distortion or to compensate for the propagation loss, respectively. The parameters … Show more

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Cited by 3 publications
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“…To date, many studies on the multilayer near-field superlenses have been done by researchers [3,[10][11][12][13][14]. Most of these studies have focused on the silverpolymer multilayer at the matching condition.…”
Section: Introductionmentioning
confidence: 98%
“…To date, many studies on the multilayer near-field superlenses have been done by researchers [3,[10][11][12][13][14]. Most of these studies have focused on the silverpolymer multilayer at the matching condition.…”
Section: Introductionmentioning
confidence: 98%
“…Most studies of multilayered superlenses have been focused on transfer-function analysis [10][11][12][13]. While this analysis reveals a lens's transmission coefficients over a range of spatial frequencies, it does not provide a measure of image-reconstruction capability, which is required for practical imaging [9].…”
Section: Introductionmentioning
confidence: 99%