2017
DOI: 10.1016/j.matchar.2017.10.016
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Multilayered vacuum-arc nanocomposite TiN/ZrN coatings before and after annealing: Structure, properties, first-principles calculations

Abstract: A B S T R A C TNanoscale multilayered TiN/ZrN films were deposited using sequential vacuum-arc deposition of Ti and Zr targets in a nitrogen atmosphere. Studies of film's properties were carried out using various modern methods of analysis, such as XRD, STEM, HRTEM, SIMS combined with results of nanoindentation and tribological tests. To interpret the mechanical properties of the deposited multilayer films first-principles calculations of TiN(111), ZrN(111) structures and TiN(111)/ZrN(111) multilayer were carr… Show more

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Cited by 49 publications
(22 citation statements)
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“…Structural features, physical-mechanical and tribological properties of multilayer structures can be reviewed in detail on the refractory and transition metals (Ti, Cr, Zr and Mo) based nitride coatings [2,10,29,82,108,118,119]. TiN/ZrN, TiN/MoN and CrN/MoN coatings were deposited on the steel substrates by the vacuum-arc evaporation method [8,99,100,120]. The vacuum chamber was equipped with a pressure control system and two evaporators with Ti, Cr or Mo targets.…”
Section: Structure Phase Composition Mechanical and Tribological Prmentioning
confidence: 99%
See 1 more Smart Citation
“…Structural features, physical-mechanical and tribological properties of multilayer structures can be reviewed in detail on the refractory and transition metals (Ti, Cr, Zr and Mo) based nitride coatings [2,10,29,82,108,118,119]. TiN/ZrN, TiN/MoN and CrN/MoN coatings were deposited on the steel substrates by the vacuum-arc evaporation method [8,99,100,120]. The vacuum chamber was equipped with a pressure control system and two evaporators with Ti, Cr or Mo targets.…”
Section: Structure Phase Composition Mechanical and Tribological Prmentioning
confidence: 99%
“…Transmission electron microscopy (TEM) images of cross sections of the TiN/ZrN multilayer coatings (bilayer thickness of about 40 nm) fabricated at −150 and −200 V demonstrate a good planarity of the layers that do not intersect and are characterized by homogeneity without droplet inclusions inside the layers and between them ( Figure 7) [123]. The friction coefficient was found to be approximately 1.2 [99,123]. Hence, TiN/ZrN multilayer systems demonstrate high hardness and resistance to wear, which indicates they can be successfully applied as protective coatings.…”
Section: Structure Phase Composition Mechanical and Tribological Prmentioning
confidence: 99%
“…It allows to improve significantly the protective properties of deposited coatings. On the other hand, the design of multilayer coatings with different composition of bilayers (soft and solid phases) allows to reduce internal stresses and brittleness while high values of hardness from 30 to 45 GPa are maintained [18][19][20][21][22][23][24][25][26][27][28]. One of the promising multilayer systems is the combination of chromium and molybdenum nitrides [29][30][31][32][33][34].…”
Section: Introductionmentioning
confidence: 99%
“…Many research groups around the world have worked on this topic, and many papers have been published that review and evaluate the recent progress in this area [127,133,155,[158][159][160]. Among the most recent and interesting multilayer solutions for protective coatings there are TiN/TiAlN [161,162], TiAlN/TaN [163], Ti(Al)N/Cr(Al)N [121], (TiAlSiY)N/MoN [164], CrN/AlSiN [165], AlCrN/TiAlTaN [166], TiSiC/NiC [167], TiN/MoN [168,169], TiN/WN [170], TiN/ZrN [171], Zr/ZrN [172], Ta/TaN [173], CrN/MoN [174][175][176], (TiZrNbHfTa)N/WN [177], and multilayer hard/soft DLC coatings [178]. In particular, the following multi-layered coatings were also deposited on cemented carbide substrates or machining tool inserts, including WC-Co-based inserts, for mechanical tests in laboratories or for industrial tests: TiN/TiAlN [162], TiAlN/TiSiN [179], CrAlSiN/TiVN [180], AlCrN/TiVN [181], TiVN/TiSiN [182], CrN/CrCN [183], AlTiCrSiYN/AlTiCrN [184] TiCrAlN/TiCrAlSiYN [185].…”
Section: Multi-layered and Graded Coatingsmentioning
confidence: 99%