Multilevel diffraction gratings inside silicon towards spectral filtering
Mehmet Bütün,
Sueda Saylan,
Rana Asgari Sabet
et al.
Abstract:Silicon-based integrated photonics holds the promise of revolutionizing key technologies, such as telecommunications, computing, and lab-on-chip systems. One can achieve diverse functionalities in two ways: on the wafer surface ("on-chip") or within its bulk ("in-chip"), the latter gaining recognition due to recent advancements in laser lithography. Until recently, 3D in-chip laser writing has only been utilized for single-level devices, leaving a vast potential for monolithic and multilevel functionality with… Show more
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