The capability of ultrashort laser pulses to deliver high precision and high yield processing in laser material micro-structuring is already on the verge of industrial uptake. Whether on surfaces or in the bulk, sub-micron processing capabilities are equally approaching a significant level of process maturity, qualifying laser technology for advanced applications in micro- and nano-fabrication. Applications in optics, energy, biology, electronics, and mechanics depend on the accessible fabrication scale. A question about the resolution limits of an ultrafast laser manufacturing process can thus be posed. What are the physical phenomena that enable confinement of light to the smallest scales? New strategies of ultrafast laser structuring are emerging nowadays that go well beyond the current optical resolutions. Harnessing the ensemble of properties of light, shaping phase and amplitude, manipulating polarization, synthesizing complex spectral fields, and mixing far and near-field components, with strategies for flexible geometries in 2D and 3D, current ultrafast laser processing techniques can reach resolutions below 100 nm, paving the way toward super-resolved laser processing, well into the nanoscale. The chapter will review several relevant tendencies in extreme laser nanostructuring on surfaces and in the bulk underlining physical mechanisms and pointing out promising emerging applications.