Multimode excitations for complex multifunctional logic device

Abstract

The simplicity and prospect of energy efficiency of microelectromechanical systems (MEMS) resonatorbased computing devices have captivated considerable research interest in recent years. Hence, they are being explored for ultralow power computing machines, which are currently needed for internetofthings (IoT) applications. Recently, there have been successful demonstrations of fundamental logic gates. However, the realization of complex multifunctional logic devices that involve multiinput and multioutput lines are facing challenges, such as the interconnections between multiple resonators and the limited controllability of the operating frequency. In this study, we demonstrate a 1:2 Demux combinational logic device with improved energy efficiency using the multi vibration modes of a single MEMS resonator. The MEMS device consists of three connected inplane microbeams in the form of a Ushape structure. The actuation and modulation are based on electrostatic forces. The device shows actuation energy of 0.082 fJ and 0.91 fJ for output 1 and output 2, respectively, and switching energy per logic operation of 11.01 pJ for output 1 and 5.31 pJ for output 2. This indicates 75% decrease in switching energy per logic operation in comparison with the previously reported values for electrostatically actuated MEMS resonatorbased computing devices.

Nonlinear mode saturation in a U-shaped micro-resonator

“…The in-plane micro-electromechanical portal frame (U-shape) structure has the advantage of being of multi-input and multi-output device, which can be utilized for applications in sensing, signal filtering, logic, and energy harvesting 7 , 28 , 29 . Its multi-channel feature can provide various tunability options with different ports/electrodes.…”

Toward cascadable MEMS logic device based on mode localization

“…multimode excitation [30], and linear and nonlinear frequency modulations [19]. A low actuation voltage and high isolation RF MEMS switches were investigated in [31] by controlling the axial stresses in microbeams to induce desirable buckling and bending effects.…”

Dynamics Characterization of a U-Shaped Micro-Resonator Portal Frame

“…These studies demonstrated the importance of proper modeling with analytical and numerical techniques to understand their complex behavior. At the micro-scale, U-shaped structures are very common for in-plane operations, such as electrothermal actuation [50], and logics [51]; as well as for out-of-plane operations, such as energy harvesting [52], and other linear and static applications.…”