Abstract:Atomic force microscopy (AFM) often relies on the assumption that cantilever bending can be described by simple beam theory and that the displacement of the tip can be evaluated from the cantilever angle. Some more advanced metrological instruments use free-space or fibre interferometers for measuring the position of the cantilever apex directly, thereby simplifying the metrology traceability chain. The next logical development, covering measurements of both the cantilever apex position and its deformation due… Show more
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