Multiple Laser Stripe Scanning Profilometry Based on Microelectromechanical Systems Scanning Mirror Projection

Abstract

In traditional laser-based 3D measurement technology, the width of the laser stripe is uncontrollable and uneven. In addition, speckle noise in the image and the noise caused by mechanical movement may reduce the accuracy of the scanning results. This work proposes a new multiple laser stripe scanning profilometry (MLSSP) based on microelectromechanical systems (MEMS) scanning mirror which can project high quality movable laser stripe. It can implement full-field scanning in a short time and does not need to move the measured object or camera. Compared with the traditional laser stripe, the brightness, width and position of the new multiple laser stripes projected by MEMS scanning mirror can be controlled by programming. In addition, the new laser strip can generate high-quality images and the noise caused by mechanical movement is completely eliminated. The experimental results show that the speckle noise is less and the light intensity distribution is more even. Furthermore, the number of pictures needed to be captured is significantly reduced to 1/N (N is the number of multiple laser stripes projected by MEMS scanning mirror) and the measurement efficiency is increased by N times, improving the efficiency and accuracy of 3D measurement.

Simultaneous Measurement of In-Plane and Out-of-Plane Displacements Using Talbot Fringe Projection

“…Images of the patterns on the surface before and after deformation are then captured using a CCD camera. Sinusoidal fringes are usually employed in fringe projection techniques to acquire the information modulated by the surface of the sample [8]. Linear-, triangular-, and hexagonal-structured patterns have also been used in fringe projection techniques [9].…”

Editorial for the Special Issue on Optical MEMS

“…This special issue contains twelve research papers covering MEMS mirrors [1,2,3,4,5,6,7,8,9,10], MEMS variable optical attenuators (VOAs) [11], and tunable spectral filters [12]. These MEMS devices are based on three of the commonly used actuation mechanisms: electrothermal [1], electrostatic [2,3,4,5,6,7,11], and electromagnetic actuation [8,9,10]. MEMS optical scanners involving single mirrors are demonstrated or used in [1,2,3,8,9,10], while all other optical microsystems employ MEMS mirror arrays that are all based on DMDs [4,5,6,7].…”

“…These MEMS devices are based on three of the commonly used actuation mechanisms: electrothermal [1], electrostatic [2,3,4,5,6,7,11], and electromagnetic actuation [8,9,10]. MEMS optical scanners involving single mirrors are demonstrated or used in [1,2,3,8,9,10], while all other optical microsystems employ MEMS mirror arrays that are all based on DMDs [4,5,6,7]. This special issue also includes one review paper on metalens-based miniaturized optical systems [13].…”

“…Among the papers on single MEMS mirrors, two are focused on MEMS device fabrication [1,10], one on optimization of the driving signals [3], one on applying MEMS mirrors for confocal microscopy [2], and two on using MEMS mirrors to generate structural light patterns for 3D measurement [8,9]. Interestingly, there are several papers reporting various applications of DMDs, including spectral filtering [4], Hadamard spectroscopy [5], wavefront/aberration correction [6], and a tunable fiber laser [7].…”