Multiple wavelength silicon photonic 200 mm R+D platform for 25Gb/s and above applications

Szelag, Bertrand; Blampey, B.; Ferrotti, Thomas; Reboud, V.; Hassan, Karim; Malhouitre, Stéphane; Grand, G.; Fowler, Daivid; Brision, S.; Rabille, G.; Brianceau, P.; Hartmann, Jean‐Michel; Hugues, Vincent; Myko, A.; Elleboode, F.; Gays, Fabien; Fédéli, Jean-Marc; Kopp, Christophe

doi:10.1117/12.2228744

Cited by 12 publications

(15 citation statements)

References 13 publications

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“…Notably, thanks to a measurement conducted at the 200mm wafer level, we are able to extract statistical data which is reported in Table 1. In Si, both strip and rib losses (3.6 and 1.5 dB/cm respectively) are consistent with the previously reported silicon waveguides characteristics [2], and we can conclude that adding the SiN layer does not affect the performance of the Si waveguides. As expected, propagation losses are much lower in SiN thanks to a lower sensitivity to waveguide roughness, itself resulting from a lower optical index contrast with the SiO 2 cladding compared to Si.…”

Section: • Sin Waveguide Propagation and Bend Lossessupporting

confidence: 91%

“…Over the last few years, our silicon photonics platform has become increasingly mature. High-performance optical components have been developed and repeatedly tested to build a complete device library [2] with reproducible performance. This Si platform is the starting point for the integration of the SiN layer.…”

Section: Fabrication Processesmentioning

confidence: 99%

“…Silicon photonics offers cost-effective and scalable solutions to a wide range of mature and emerging applications, such as telecommunication and datacom [1][2][3], high-performance computing [4], quantum communications and computation [5][6][7], LIDAR (Light Detection And Ranging) [8][9][10][11], and nonlinear optics [12][13][14]. In the last few years, silicon platforms have been enriched with complementary functionalities by integrating other optically active materials into the platform, while preserving the complementary metal-oxide-semiconductor (CMOS) compatibility.…”

Section: Introductionmentioning

confidence: 99%

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A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications

et al. 2019

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Silicon photonics is one of the most prominent technology platforms for integrated photonics and can support a wide variety of applications. As we move towards a mature industrial core technology, we present the integration of silicon nitride (SiN) material to extend the capabilities of our silicon photonics platform. Depending on the application being targeted, we have developed several integration strategies for the incorporation of SiN. We present these processes, as well as key components for dedicated applications. In particular, we present the use of SiN for athermal multiplexing in optical transceivers for datacom applications, the nonlinear generation of frequency combs in SiN micro-resonators for ultra-high data rate transmission, spectroscopy or metrology applications and the use of SiN to realize optical phased arrays in the 800–1000 nm wavelength range for Light Detection And Ranging (LIDAR) applications. These functionalities are demonstrated using a 200 mm complementary metal-oxide-semiconductor (CMOS)-compatible pilot line, showing the versatility and scalability of the Si-SiN platform.

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Section: • Sin Waveguide Propagation and Bend Lossessupporting

confidence: 91%

Section: Fabrication Processesmentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

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A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications

et al. 2019

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“…The device Si can act as a waveguiding core as it has larger refractive index than its surrounding silicon dioxide (SiO 2 ) or silicon nitride (SiN) materials. The material platform, most notably specified by the thickness of the device silicon, has gradually come to a consensus of around 220 nm [17][18][19][20][21] though some variations exist for better integration with transistors [22] or for more tolerable optical performance [23,24]. SiN, commonly found in many CMOS processes, can also act as a waveguiding material in Si photonics.…”

Section: Waveguiding Materialsmentioning

confidence: 99%

Si Photonics for Practical LiDAR Solutions

et al. 2019

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In the article the authors discuss light detection and ranging (LiDAR) for automotive applications and the potential roles Si photonics can play in practice. The authors review published research work on Si photonics optical phased array (OPA) and other relevant devices in the past decade with in-depth technical analysis with respect to practical system design considerations. The commercialization status of certain LiDAR technologies is briefly introduced.

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“…In the early days, the fabs chose 220 nm SOI as the substrate for their platform development [24], [25], [27], [31], [41]. More recently silicon photonics open-access platforms based on 310 nm SOI [26], [40], 500 nm SOI [155], SiN and Germanium-based mid-infrared platforms have also emerged. The technology, access mechanism and wafer size used are also listed in Table. I.…”

Section: Open-access Modalitiesmentioning

confidence: 99%

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

et al. 2018

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Silicon Photonics is widely acknowledged as a gamechanging technology, driven by the needs of datacom and telecom. Silicon Photonics builds on highly capital-intensive manufacturing infrastructure, and mature open-access silicon photonics platforms are translating the technology from research fabs to industrial manufacturing levels. To meet the current market demands for silicon photonics manufacturing, a variety of openaccess platforms is offered by CMOS pilot lines, R&D institutes and commercial foundries. This paper presents an overview of existing and upcoming commercial and non-commercial openaccess silicon photonics technology platforms. We also discuss the diversity in these open-access platforms and their key differentiators.

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Multiple wavelength silicon photonic 200 mm R+D platform for 25Gb/s and above applications

Cited by 12 publications

References 13 publications

A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications

A Versatile Silicon-Silicon Nitride Photonics Platform for Enhanced Functionalities and Applications

Si Photonics for Practical LiDAR Solutions

Open-Access Silicon Photonics: Current Status and Emerging Initiatives

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