Multipoint vibrometry with dynamic and static holograms

Haist, Tobias; Lingel, Christian; Winter, Marcus; Giesen, Moritz; Ritter, Frank N.; Sandfort, K.; Rembe, Christian; Bendel, Karl

doi:10.1063/1.4845596

Cited by 17 publications

(7 citation statements)

References 24 publications

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“…Since the number of channels is limited due to the high cost of a vibrometer, the flexible adjustment of the measurement is essential. Such a system, which is capable of adjusting an arbitrary measurement grid, has been demonstrated by Haist et al [63]. The multichannel vibrometer has been realized as complex bulk-optics setup with holograms to split the laser light to multiple channels with homodyne [64] or heterodyne [65].…”

Section: Multi-beammentioning

confidence: 99%

Laser Doppler Vibrometry Measurements in Structural Dynamics

Chiariotti¹,

Rembe²,

Castellini³

et al. 2020

Handbook of Experimental Structural Dynamics

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Laser vibrometry is a powerful tool for measurement of vibration on a variety of structures. Lasers do not mass-load or otherwise change the dynamics of a structure, and so they have enabled measurements from surfaces that are too light, delicate, hot, etc. to allow conventional surface mounted sensors. The position of the measurement point can also be changed readily. Thus, laser vibrometry has also allowed acquisition of measurements over a dense grid of points, to more completely characterize a structure its deformation shapes, the evolution of stress waves, or the identification of structural damages than it might be feasible with other methods. The chapter is divided in two sections: the first one is intended to provide an insight about the theory behind laser Doppler vibrometry (LDV), while the second section aims at giving an overview of the different types of laser Doppler vibrometers that have been developed so far. The chapter is not intended to give a comprehensive discussion of laser Doppler vibrometry, but it provides sufficient details about potentials, issues, and best practice approaches for successfully exploiting such technique in structural dynamics testing. References are provided to direct the interested reader to more detailed information as well as to examples of application cases.

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Section: Multi-beammentioning

confidence: 99%

Laser Doppler Vibrometry Measurements in Structural Dynamics

Chiariotti¹,

Rembe²,

Castellini³

et al. 2020

Handbook of Experimental Structural Dynamics

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“…Most available LDV systems use helium-neon (HeNe) laser sources at low power, not compatible with multi-channel configurations. Using bulk optics and holographic components, a flexible 12-channel vibrometer within a single optical head [10] has been realized. However, the alignment of the optics is very time consuming, difficult, and hence expensive.…”

Section: Introduction: Photonic Integration For Laser-doppler Vibrometrymentioning

confidence: 99%

Integrated nanophotonic frequency shifter on the silicon-organic hybrid (SOH) platform for laser vibrometry

Lauermann¹,

Weimann²,

Palmer³

et al. 2014

AIP Conference Proceedings

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“…On the static property side, higher-dynamic-range and higher-throughput dimensional metrology over larger wafer areas is becoming increasingly important in the semiconductor industry with the advances in microelectromechanical-system (MEMS) devices and three-dimensional stacked integrated circuits (3D-ICs) based on vertical interconnects with micro-bumps and through-silicon-vias (TSVs) 9 . So far, surface metrology using interferometry [10][11][12][13][14] and confocal microscopy 15,16 have been utilized, however, each method has limitations in terms of measurement range and speed, respectively.…”

Section: Introductionmentioning

confidence: 99%

Massively parallel electro-optic sampling of space-encoded optical pulses for ultrafast multi-dimensional imaging

Kim

Kwak

et al. 2022

Preprint

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High-speed and high-resolution imaging of surface profiles is critical for the investigation of various structures and mechanical dynamics of micro- and nano-scale devices. In particular, recent emergence of various nonlinear, transient and complex mechanical dynamics, such as anharmonic vibrations in mechanical resonators, has necessitated real-time surface deformation imaging with higher axial and lateral resolutions, speed, and dynamic range. However, real-time capturing of fast and complex mechanical dynamics has been challenging, and direct time-domain imaging of displacements and mechanical motions has been a missing element in studying full-field structural and dynamic behaviours. Here, by exploiting the electro-optic sampling with a frequency comb, we demonstrate a line-scan time-of-flight (TOF) camera that can simultaneously measure the TOF changes of more than 1000 spatial coordinates with hundreds megapixels/s pixel-rate and sub-nanometre axial resolution over several millimetres field-of-view. This unique combination of performances enables fast and precise imaging of both complex structures and dynamics in three-dimensional devices and mechanical resonators.

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Multipoint vibrometry with dynamic and static holograms

Cited by 17 publications

References 24 publications

Laser Doppler Vibrometry Measurements in Structural Dynamics

Laser Doppler Vibrometry Measurements in Structural Dynamics

Integrated nanophotonic frequency shifter on the silicon-organic hybrid (SOH) platform for laser vibrometry

Massively parallel electro-optic sampling of space-encoded optical pulses for ultrafast multi-dimensional imaging

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