1996
DOI: 10.1063/1.116520
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Multipurpose sensor tips for scanning near-field microscopy

Abstract: The reproducible micromachining of hollow metal tips on Si cantilevers and their applicability to scanning probe microscopy techniques are described. Provided with apertures below 130 nm and hollow pyramidal tips proved to be highly suited probes for scanning near-field optical microscopy (SNOM). First results of combined SFM/SNOM measurements together with scanning electron microscopy (SEM) photographs of the new sensors are presented. The SNOM images show a resolution of about 100 nm demonstrating the useful… Show more

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Cited by 117 publications
(54 citation statements)
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“…4.1(b) (top left inset, red) shows a waveguide with diameters of the minor and major axes of the entrance (exit) apertures of 2.4 µm (40 nm) and 4.8 µm (440 nm), respectively. Previously, optical second harmonic generation was used to characterize local fields at the exit aperture [91] of hollow near-field probes [92]. Here, we utilize surface-enhanced third harmonic (TH) generation as a confirmation of field enhancement and efficient waveguide coupling [71,5,6,93,81].…”
Section: Chapter 4 Generation and Bistability Of A Waveguide Nanoplasmamentioning
confidence: 99%
“…4.1(b) (top left inset, red) shows a waveguide with diameters of the minor and major axes of the entrance (exit) apertures of 2.4 µm (40 nm) and 4.8 µm (440 nm), respectively. Previously, optical second harmonic generation was used to characterize local fields at the exit aperture [91] of hollow near-field probes [92]. Here, we utilize surface-enhanced third harmonic (TH) generation as a confirmation of field enhancement and efficient waveguide coupling [71,5,6,93,81].…”
Section: Chapter 4 Generation and Bistability Of A Waveguide Nanoplasmamentioning
confidence: 99%
“…This issue improved after the introduction of the pit-approach in 1996 by Milhalcea [63], figure 1(C), in which a sharp etch pit was used as a template to construct the aperture. The pit typically forms following the anisotropic etch characteristics of crystalline silicon in hydroxide-based solutions [64,65].…”
Section: Introductionmentioning
confidence: 99%
“…2, is a modification of a scanning near field optical microscope (SNOM), which employs hollowpyramid probes supported on a flexible cantilever that acts both as an optical screen and as a force sensor [11]. Control of the tip-sample distance is regulated by an optical feedback on the cantilever.…”
mentioning
confidence: 99%