Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser

Zheng, Jianyi; Huang, Jiaxu; Xu, Shaolin

doi:10.1016/j.optlaseng.2019.105940

Cited by 31 publications

(7 citation statements)

References 31 publications

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“…[ 43 ] The cylindrical vector beams with designable polarization distributions have been considered to create hierarchical micro‐nanostructures with LIPSS on the surface in a single step. [ 44–46 ]…”

Section: Resultsmentioning

confidence: 99%

Hierarchical Conical Metasurfaces as Ultra‐Broadband Perfect Absorbers from Visible to Far‐Infrared Regime

Hu,

Xu,

Huang

et al. 2023

Adv Funct Materials

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Wideband perfect absorbers are widely demanded for various applications, including efficient photodetection, radiation cooling. However, achieving perfect absorption across an extensive range of wavelengths on engraved structured substrate remains a challenge due to the complex light responses. It presents a hierarchical conical metasurface that demonstrates distinct perfect absorption from visible to far‐infrared range (0.4–16 µm), which is composed of surface‐engraved high aspect ratio nanogratings on microcones. The perfect absorption in the typical reststrahlen band of 4H‐SiC primarily relies on a light‐trapping‐enhanced surface phonon polaritons (SPhPs) mechanism, where the microcones effectively confine and enhance the SPhPs excited by the nanogratings through light trapping. Outside the reststrahlen band, the dominant mechanism for light antireflection is the light trapping of microcones assisted by nanogratings, which act as an equivalent antireflection layer. The hierarchical cones exhibit exceptional broadband performance, achieving an average absorptance of 98% over the spectrum of 0.4–16 µm with wide‐angle feasibility, and are fabricated using one‐step ultrafast‐laser ablation with ring‐shaped vector beams. Notably, the hierarchical cones can be applied to various materials, showing significant potential for use in photodetectors.

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Section: Resultsmentioning

confidence: 99%

Hierarchical Conical Metasurfaces as Ultra‐Broadband Perfect Absorbers from Visible to Far‐Infrared Regime

Hu,

Xu,

Huang

et al. 2023

Adv Funct Materials

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“…Based on these properties, SiC is widely used in nano-electromechanical systems (NEMS) and high-temperature high-power device fabrication. [1][2][3] However, due to its own hardness property (Mohs hardness of 9), the tool wear during nanocutting of SiC is extremely severe, which has a significant impact on the surface integrity and subsurface quality. Therefore, to investigate the material removal mechanism of hard-brittle materials at the nanoscale, so as to improve the material removal rate and suppress the subsurface damage, research scholars have proposed a variety of effective DOI: 10.1002/adts.202300613 auxiliary technologies.…”

Section: Introductionmentioning

confidence: 99%

Effect of Laser Power on Nanocutting Mechanism of Silicon Carbide Ceramic: A Molecular Dynamics Simulation

Liu,

Wang,

Yang

et al. 2023

Advcd Theory and Sims

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Silicon carbide (SiC) ceramic is being increasingly applied in several engineering fields owing to its excellent saturation electron drift rate. Although much attention is paid to its material removal mechanism, producing a high‐quality SiC surface with a high material removal rate is still a challenging issue. Therefore, there is a need to investigate the material removal mechanism of SiC to improve the processing performance. In this study, the laser heating‐assisted nanocutting models are established using a molecular dynamics method. Then, a laser beam with various energies is irradiated onto the SiC. The influence of average laser power on the nanocutting mechanism of SiC is revealed in terms of the temperature of the machined region, cutting force, stress distribution state, subsurface damage, and tool wear. The results demonstrate that within the scope of this study, the using of laser irradiation methods has a positive effect on the machinability of SiC at the nanoscale, provided that the laser power density does not exceed the ablation threshold. Meanwhile, the results indicate that laser heating‐assisted methods have played an important role in suppressing tool wear. This study has significant theoretical and practical value in processing technology.

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“…Micro and nano processing is an important part of advanced manufacturing and is a symbol of the level of high-end manufacturing ( Sugioka, 2019 ). The emergence of femtosecond laser processing technology has brought revolutionary changes into the field of micro and nano processing ( Zheng et al, 2020 ; Mastellone et al, 2020 ; Xie et al, 2021 ; Yan et al, 2021 ; Zhang et al, 2022 ; He et al, 2022 ). Femtosecond laser has a very narrow pulse width and high peak power, and the energy interacts with the material in a very short period of time during processing ( Chichkov et al, 1996 ; Meng et al, 2019 ; Hua et al, 2022 ).…”

Section: Introductionmentioning

confidence: 99%

Research advances of femtosecond laser-induced nanogratings for transparent materials

Xie

et al. 2022

Front. Chem.

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Femtosecond laser-induced nanogratings generation inside transparent materials has been the focus of research in the field of femtosecond laser precision processing. Due to the advantages of optical birefringence phenomenon, periodicity, thermal stability, controllability of delay value and optical axis direction, and re-writability, nanogratings are widely used in research fields such as optical storage and optical devices. This mini-review explores the existing mechanism of femtosecond laser-induced formation of nanogratings and the progress of inducing nanogratings in different types of glass and sapphire crystals. It also describes the prospects of nanogratings for a wide range of applications in optical components and optical devices.

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Multiscale micro-/nanostructures on single crystalline SiC fabricated by hybridly polarized femtosecond laser

Cited by 31 publications

References 31 publications

Hierarchical Conical Metasurfaces as Ultra‐Broadband Perfect Absorbers from Visible to Far‐Infrared Regime

Hierarchical Conical Metasurfaces as Ultra‐Broadband Perfect Absorbers from Visible to Far‐Infrared Regime

Effect of Laser Power on Nanocutting Mechanism of Silicon Carbide Ceramic: A Molecular Dynamics Simulation

Research advances of femtosecond laser-induced nanogratings for transparent materials

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