2010
DOI: 10.1364/ol.35.003766
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Multispectral microbolometers for the midinfrared

Abstract: The spectral responsivity and the dynamic behavior of microbolometers with an integrated absorbing metamaterial are investigated. Wavelength tailoring and tuning in different microbolometers are achieved by varying the lateral extension of the absorber elements. Maximum sensitivity is tuned between 2.9 and 7.7 μm, with peak absorptions reaching up to 88%. The presence of a continuous metallic shielding layer affects heat conduction and leads to faster thermal response times.

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Cited by 168 publications
(83 citation statements)
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“…74 The absorption characteristics of similar devices were further simulated in Ref. 75. The devices were discussed as metamaterials, but data for the dielectric permittivity and magnetic permeability were not presented.…”
Section: Spectrally Selective Detector Technologymentioning
confidence: 99%
“…74 The absorption characteristics of similar devices were further simulated in Ref. 75. The devices were discussed as metamaterials, but data for the dielectric permittivity and magnetic permeability were not presented.…”
Section: Spectrally Selective Detector Technologymentioning
confidence: 99%
“…Due to the resonant behavior of LHMs, LHMs can exhibit extreme values of the effective medium parameters such as large and negative dielectric permittivity and permeability [3] which usually renders them dissipative and can be scaled from microwave [4] and terahertz [5,6] through the infrared [7,8] almost into optical frequencies [10]. Optimized metamaterials with high absorption have been proposed for applications such as thermal spatial light modulators [11], plasmonic sensors [12,13], thermal bolometers [14], anti-reflection coatings [15] and solar thermo-photovoltaic [16]. The goal of photovoltaic structures is to absorb as much light as possible within specific layers.…”
Section: Introductionmentioning
confidence: 99%
“…[19]. Several efforts have been made on terahertz metamaterial absorbers [8,9,14]. As photovoltaic device thicknesses continue to shrink and nanostructured designs emerge where their feature sizes reach the order of 1.0 m  or less, geometric optics no longer provides an accurate description of field propagation at optical wavelengths.…”
mentioning
confidence: 99%
“…Plasmonic metamaterial absorbers are structurally scalable, which enables a wide range of applications at various wavelengths, including solar cells in the visible range [6], biological sensors in the near infrared (IR) [7] and middle IR [8], and thermal sensors in the IR [9][10][11][12] and terahertz ranges [13,14], as well as EW shielding [15] and wireless microwave transfer [16]. Wavelength-selective IR absorbers show significant promise as advanced uncooled IR sensors since they allow the identification of objects through their radiation spectra [17], and many applications of these devices are anticipated, such as in gas analysis, fire detection, multi-color imaging [18], and hazardous materials recognition [19].…”
Section: Introductionmentioning
confidence: 99%
“…Metal-insulator-metal (MIM)-type absorbers [20,21] are important candidates for wavelength-selective uncooled IR sensors due to their small thermal mass and size. However, the presence of insulating layers, including SiO 2 , Al 2 O 3 , and SiN, can cause spurious peaks due to intrinsic absorption [9], which Photonics 2016, 3, 9 2 of 8 prevents these absorbers from operating at long IR wavelengths in the vicinity of 10 µm [22]. This is an important wavelength region for the observation of living beings as well as for the sensing of gaseous compounds such as ethanol.…”
Section: Introductionmentioning
confidence: 99%