N dependent tribochemistry: Achieving superhard wear-resistant low-friction TaC x N y films

Du, Suxuan; Zhang, Kan; Meng, Qingnan; Ren, Ping; Hu, Chaoquan; Wen, Mao; Zheng, Weitao

doi:10.1016/j.surfcoat.2017.09.006

Cited by 25 publications

(7 citation statements)

References 67 publications

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“…Physical vapor deposition (PVD) is known to access metastable phases due to highly limited kinetics during film growth (extremely high cooling rates 10 13 K·s −1 ) and a pronounced introduction of structural defects, such as point defects. Considering all these aspects, a stabilization of fcc structured Ta-C-N by PVD is a plausible scenario, and indeed has been already reported before 24 . To date, Ta-C-N thin films have only been employed as diffusion barriers between copper and silicon in semiconductor devices 25 .…”

Section: Introductionsupporting

confidence: 70%

“…At this point, we have to mention that a different behavior is reported by S. Du et al . 24 . To estimate the brittle to ductile behavior of different material classes, semi empirical criteria have been employed.…”

Section: Resultsmentioning

confidence: 99%

“…To date, Ta-C-N thin films have only been employed as diffusion barriers between copper and silicon in semiconductor devices 25 . Their use as protective coating with excellent mechanical properties, especially in a highly crystalline constitution, is indeed relatively unexplored 24 , 26 .…”

Section: Introductionmentioning

confidence: 99%

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Tuning structure and mechanical properties of Ta-C coatings by N-alloying and vacancy population

Glechner

Mayrhofer

Holec

et al. 2018

Sci Rep

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Tailoring mechanical properties of transition metal carbides by substituting carbon with nitrogen atoms is a highly interesting approach, as thereby the bonding state changes towards a more metallic like character and thus ductility can be increased. Based on ab initio calculations we could prove experimentally, that up to a nitrogen content of about 68% on the non-metallic sublattice, Ta-C-N crystals prevail a face centered cubic structure for sputter deposited thin films. The cubic structure is partly stabilized by non-metallic as well as Ta vacancies – the latter are decisive for nitrogen rich compositions. With increasing nitrogen content, the originally super-hard fcc-TaC0.71 thin films soften from 40 GPa to 26 GPa for TaC0.33N0.67, accompanied by a decrease of the indentation modulus. With increasing nitrogen on the non-metallic sublattice (hence, decreasing C) the damage tolerance of Ta-C based coatings increases, when characterized after the Pugh and Pettifor criteria. Consequently, varying the non-metallic sublattice population allows for an effective tuning and designing of intrinsic coating properties.

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Section: Introductionsupporting

confidence: 70%

Section: Resultsmentioning

confidence: 99%

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Tuning structure and mechanical properties of Ta-C coatings by N-alloying and vacancy population

Glechner

Mayrhofer

Holec

et al. 2018

Sci Rep

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show abstract

“…Here it is worth noting that the characteristic D peak (1360 cm −1 ) and G peak (1600 cm −1 ) of graphite are detected, where the intensity of D peak is higher than that of G peak, indicating that the graphite has the severe defect and disorder . In fact, graphite‐like carbon cluster can be formed through unstable sp 3 bonds break and stable sp 2 bonds reconstruction . Here a reasonable explanation for the phenomenon is that the replaced carbon atoms (Figure C) driven by large shear stress and frictional heat achieve graphitization through self‐assembly method.…”

Section: Resultsmentioning

confidence: 87%

Temperature‐driven wear behavior of Si₃N₄‐based ceramic reinforced by in situ formed TiC_0.3N_0.7 particles

et al. 2019

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Si 3 N 4 as a structural ceramic is desirable for applications in spacecraft, transportation, and energy, but its poor high-temperature properties still do not satisfy the actual requirements. Here, a TiC 0.3 N 0.7 reinforced Si 3 N 4 ceramic is successfully designed and fabricated via the high-temperature nitridation of TiC x . It is found that TiC 0.3 N 0.7 grains with the size of 1-2 μm are uniformly dispersed in the Si 3 N 4 matrix and show a firm bond with substrate. Compared with pure Si 3 N 4 , the doping of harder TiCN phase can effectively improve ceramic's hardness and fracture toughness at a certain temperature. Importantly, the ceramic material displays extraordinary wear resistance across a wide temperature range (eg, the wear rate of TiC 0.3 N 0.7 containing Si 3 N 4 over 63 times and 178 times better than pure Si 3 N 4 at 600 and 900°C, respectively). More broadly, a correlation between wear mechanism and temperature is established, and the result shows that the mechanical strength and tribochemical oxidation as two key factors determine the wear behavior of the material. These results developed here can provide a springboard for preparation and optimization of multiphase ceramics that serve under hightemperature conditions. K E Y W O R D S high temperature, mechanical properties, nitridation, Si 3 N 4 , wear/wear resistance

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“…However, when reaching a distance of 17.5 m, the friction machine automatically stopped the measurement as a result of exceeding the permissible friction coefficient (>1.1). Coating 5 with the highest carbon content showed the lowest and the most stable f~0.3 at a distance up to 25.7 m, followed by a jump to 0.65 (25.8-32.4 m), and further monotonous increase from 0.39 up to 0.76 at the distance from 32 to 50 m. This behavior can be explained by the positive role of carbon [45,46], as well as by specific tribochemical reactions [47].…”

Section: Resultsmentioning

confidence: 88%

Structure, Oxidation Resistance, Mechanical, and Tribological Properties of N- and C-Doped Ta-Zr-Si-B Hard Protective Coatings Obtained by Reactive D.C. Magnetron Sputtering of TaZrSiB Ceramic Cathode

Kiryukhantsev-Korneev

Сытченко

Vorotilo

et al. 2020

Coatings

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Coatings in the Ta-Zr-Si-B-C-N system were produced by magnetron sputtering of a TaSi2-Ta3B4-(Ta,Zr)B2 ceramic target in the Ar medium and Ar-N2 and Ar-C2H4 gas mixtures. The structure and composition of coatings were studied using scanning electron microscopy, glow discharge optical emission spectroscopy, energy-dispersion spectroscopy, and X-ray diffraction. Mechanical and tribological properties of coatings were determined using nanoindentation and pin-on-disk tests using 100Cr6 and Al2O3 balls. The oxidation resistance of coatings was evaluated by microscopy and X-ray diffraction after annealing in air at temperatures up to 1200 °C. The reactively-deposited coatings containing from 30% to 40% nitrogen or carbon have the highest hardness up to 29 GPa and elastic recovery up to 78%. Additionally, coatings with a high carbon content demonstrated a low coefficient of friction of 0.2 and no visible signs of wear when tested against 100Cr6 ball. All coatings except for the non-reactive ones can resist oxidation up to a temperature of 1200 °C thanks to the formation of a protective film based on Ta2O5 and SiO2 on their surface. Coatings deposited in Ar-N2 and Ar-C2H4 demonstrated superior resistance to thermal cycling in conditions 20-T−20 °C (where T = 200–1000 °C). The present article compares the structure and properties of reactive and “standard-inert atmosphere” deposited coatings to develop recommendations for optimizing the composition.

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N dependent tribochemistry: Achieving superhard wear-resistant low-friction TaC x N y films

Cited by 25 publications

References 67 publications

Tuning structure and mechanical properties of Ta-C coatings by N-alloying and vacancy population

Tuning structure and mechanical properties of Ta-C coatings by N-alloying and vacancy population

Temperature‐driven wear behavior of Si₃N₄‐based ceramic reinforced by in situ formed TiC_0.3N_0.7 particles

Structure, Oxidation Resistance, Mechanical, and Tribological Properties of N- and C-Doped Ta-Zr-Si-B Hard Protective Coatings Obtained by Reactive D.C. Magnetron Sputtering of TaZrSiB Ceramic Cathode

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N dependent tribochemistry: Achieving superhard wear-resistant low-friction TaC x N y films

Cited by 25 publications

References 67 publications

Tuning structure and mechanical properties of Ta-C coatings by N-alloying and vacancy population

Tuning structure and mechanical properties of Ta-C coatings by N-alloying and vacancy population

Temperature‐driven wear behavior of Si3N4‐based ceramic reinforced by in situ formed TiC0.3N0.7 particles

Structure, Oxidation Resistance, Mechanical, and Tribological Properties of N- and C-Doped Ta-Zr-Si-B Hard Protective Coatings Obtained by Reactive D.C. Magnetron Sputtering of TaZrSiB Ceramic Cathode

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Temperature‐driven wear behavior of Si₃N₄‐based ceramic reinforced by in situ formed TiC_0.3N_0.7 particles