2020
DOI: 10.1109/led.2020.3022401
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N-Polar GaN-on-Sapphire Deep Recess HEMTs With High W-Band Power Density

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Cited by 35 publications
(16 citation statements)
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“…Optimizing GaN HEMTs for high-breakdown tends to also compromise the gate-drain capacitance parasitics that impact millimeter-wave performance. Recent work on N-polar GaN may offer new device physics for millimeter-wave operation [21]. Above 250 GHz, the InP HBT and GaAs mHEMT stand out as the only technologies that generate reasonable output power.…”
Section: Theoretical Comparisons Against Published Workmentioning
confidence: 99%
“…Optimizing GaN HEMTs for high-breakdown tends to also compromise the gate-drain capacitance parasitics that impact millimeter-wave performance. Recent work on N-polar GaN may offer new device physics for millimeter-wave operation [21]. Above 250 GHz, the InP HBT and GaAs mHEMT stand out as the only technologies that generate reasonable output power.…”
Section: Theoretical Comparisons Against Published Workmentioning
confidence: 99%
“…The lack of high quality N-polar GaN hinders the development of Npolar GaN-based devices. In the recent years, N-polar GaN with an atomic smooth surface and reduced defects grown by metal organic chemical vapor deposition (MOCVD) has been reported by researchers [17][18][19][20], and the N-polar high electron mobility transistors (HEMTs), ultraviolet LEDs with superior performance have also been designed [21][22][23][24][25]. However, seldom experimental reports could be found for the investigation of N-polar red LEDs [10].…”
Section: Introductionmentioning
confidence: 99%
“…With ultra-scaled semiconductor devices, self-heating is a common problem that makes thermal management of electronics at every possible level essential for sustaining higher power densities in almost all applications, including computation, 5G/6G, and power electronics. [1][2][3][4] Self-heating under operating conditions leads to increased junction temperatures. The elevated channel temperature degrades device performance, by reducing channel mobility, which further increases the self-heating due to increased channel resistance, thus setting were introduced to the chamber and optimized to enhance sp 2 etching at lower temperatures and to promote sp 3 formation.…”
Section: Introductionmentioning
confidence: 99%
“…To effectively nucleate and simultaneously decrease the re-nucleation rate to form larger grains, a combination of sample #B 1 and #B 2 growth parameters were used to achieve the results shown in Figure 2d,e for sample #B 3 . Using a relatively higher O 2 concentration right after the high re-nucleation stage makes the etching and growth comparable which reduces sp 2 carbon formation and at the same time minimizes the possibility of substrate damage (5-3%CH 4 , 1-2%O 2 ).…”
mentioning
confidence: 99%