2015
DOI: 10.1155/2015/527025
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N‐Type Conductive Ultrananocrystalline Diamond Films Grown by Hot Filament CVD

Abstract: We present the synthesis of ultrananocrystalline diamond (UNCD) films by application of hot filament chemical vapor deposition (HFCVD). We furthermore studied the different morphological, structural, and electrical properties. The grown films are fine grained with grain sizes between 4 and 7 nm. The UNCD films exhibit different electrical conductivities, dependent on grain boundary structure. We present different contact metallizations exhibiting ohmic contact behavior and good adhesion to the UNCD surface. Th… Show more

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Cited by 17 publications
(9 citation statements)
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“…15 As the measuring temperature increases to 400 o C, the corresponding activation energy increases to 0.05-0.15 eV. 45 It is likely that p-type conductivity is induced by the H-terminated diamond grains, while GBs induce n-type conductivity after hydrogen bondings decomposed at higher annealing temperature, which explains the p-type to n-type conductivity conversion from as-deposited sample to sample 900-A. However, oxygen also induced an n-type conductive layer with an activation energy of about 0.32 eV in single crystalline diamond by ion implantation.…”
Section: (B)mentioning
confidence: 99%
“…15 As the measuring temperature increases to 400 o C, the corresponding activation energy increases to 0.05-0.15 eV. 45 It is likely that p-type conductivity is induced by the H-terminated diamond grains, while GBs induce n-type conductivity after hydrogen bondings decomposed at higher annealing temperature, which explains the p-type to n-type conductivity conversion from as-deposited sample to sample 900-A. However, oxygen also induced an n-type conductive layer with an activation energy of about 0.32 eV in single crystalline diamond by ion implantation.…”
Section: (B)mentioning
confidence: 99%
“…Ikeda et al [6] correlated the enhancement of electrical conductivity of nitrogen-doped UNCD films to the enlargement of ordering and fraction of sp 2 -carbon at the grain boundary. Mertens et al [7] have studied the electrical conductivity of nitrogen-doped UNCD films. Their results suggest that the n-type conduction depends on the structure and volume of the grain boundary.…”
Section: Introductionmentioning
confidence: 99%
“…NH3 is preferred over N2 because of weaker N-H bond as compared to stronger NN bond of N2 under HFCVD reactor [10]. The reported N/C ratio in the feedstock is varied from as small as 0.1 to greater than 150 % for the growth of N doped diamonds [10][11][12][13][14][15][16][17][18][19][20][21]. The presence of N in feedstock significantly affect the growth mechanism, morphology, growth rate, grain size, chemical bonding at grain and GBs.…”
Section: Introductionmentioning
confidence: 99%
“…Further, the morphology and growth habit change due to the orientation dependent growth rate which results in texturing of diamond films [11,12,13,14,15,16]. Also, the presence of N in the feedstock increases the amount of H impurity incorporation in diamond during growth [17].…”
Section: Introductionmentioning
confidence: 99%