Extended Abstracts of the 2015 International Conference on Solid State Devices and Materials 2015
DOI: 10.7567/ssdm.2015.b-4-4
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N-type Doping Effect of Transferred MoS<sub>2</sub> and WSe<sub>2</sub> Monolayer

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“…The sapphire/MoS 2 /PMMA substrate was subsequently immersed in an ammonia solution for one to two hours to separate the MoS 2 /PMMA film from the sapphire substrate. 43,44 After transferring the MoS 2 /PMMA film onto the Si/SiO 2 substrate, the PMMA protection layer was removed using acetone. The sample was then immersed in an N-methyl-2-pyrrolidone solution for wet cleaning to remove residues or contamination on the MoS 2 surface.…”
Section: Device Fabricationmentioning
confidence: 99%
“…The sapphire/MoS 2 /PMMA substrate was subsequently immersed in an ammonia solution for one to two hours to separate the MoS 2 /PMMA film from the sapphire substrate. 43,44 After transferring the MoS 2 /PMMA film onto the Si/SiO 2 substrate, the PMMA protection layer was removed using acetone. The sample was then immersed in an N-methyl-2-pyrrolidone solution for wet cleaning to remove residues or contamination on the MoS 2 surface.…”
Section: Device Fabricationmentioning
confidence: 99%