2009
DOI: 10.1166/sl.2009.1132
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Na+ and K+ Implanted Membranes for Micro-Sensors Development

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Cited by 6 publications
(5 citation statements)
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“…Moreover, multiple membranes sensitive to various ions can be fabricated on the wafer level using multiple implants and different photolithographic masks. The ion-implantation technique was applied to develop Na +--and K + -sensitive EIS sensors by implanting Na + or K + ions into the oxidized silicon nitride through an Al buffer layer [74,75]. Although, these sensors demonstrate good sensitivity (52 mV/pNa and 49 mV/pK [75]), the response to interfering ions and pH was non-negligible, evidencing a poor selectivity of implanted ion-sensitive layers.…”
Section: Ion-sensitive Eis Sensorsmentioning
confidence: 99%
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“…Moreover, multiple membranes sensitive to various ions can be fabricated on the wafer level using multiple implants and different photolithographic masks. The ion-implantation technique was applied to develop Na +--and K + -sensitive EIS sensors by implanting Na + or K + ions into the oxidized silicon nitride through an Al buffer layer [74,75]. Although, these sensors demonstrate good sensitivity (52 mV/pNa and 49 mV/pK [75]), the response to interfering ions and pH was non-negligible, evidencing a poor selectivity of implanted ion-sensitive layers.…”
Section: Ion-sensitive Eis Sensorsmentioning
confidence: 99%
“…The ion-implantation technique was applied to develop Na +--and K + -sensitive EIS sensors by implanting Na + or K + ions into the oxidized silicon nitride through an Al buffer layer [74,75]. Although, these sensors demonstrate good sensitivity (52 mV/pNa and 49 mV/pK [75]), the response to interfering ions and pH was non-negligible, evidencing a poor selectivity of implanted ion-sensitive layers. Finally, several types of EIS sensors sensitive towards Ni 2+ [76], Cu 2+ [77], and Hg 2+ [78] were realized via the deposition of ion-recognition molecules (macrocyclic compounds such as calixarenes [79]) directly onto the gate surface.…”
Section: Ion-sensitive Eis Sensorsmentioning
confidence: 99%
“…In the literature, there are many examples of potassium sensors that have been developed, which are based on different technologies, including: flame atomic absorption spectrometry , ion chromatography , surface Plasmon resonance , and electrochemical methods . These latter play an important role in the development of biosensors due to their fast response, high sensitivity, simple instrumentation, low production cost, and portability.…”
Section: Introductionmentioning
confidence: 99%
“…Metal-ion-responsive chemosensors have attracted increasing interest in the past decade due to their environmental and biological relevance. Among them, the quantitative probing of K + ions is quite crucial due to their active roles of chemical signal transduction in biological systems. Compared to the design of typical colorimetric and fluorometric chemosensors of heavy metal ions (e.g., Cu 2+ , Hg 2+ , and Zn 2+ , etc.…”
Section: Introductionmentioning
confidence: 99%