2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS) 2013
DOI: 10.1109/memsys.2013.6474343
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Nano actuator and “pull-back” nonlinearity

Abstract: This paper presents an optical force driven nano-machined actuator and the "pull-back" effect of a free-standing arc in an opto-mechanical ring resonator system. This nano-actuator obtains a maximal central displacement of 43.1 nm, with an actuation resolution of 0.28 nm, via tuning the wavelength of the control light at a fixed optical power of 2.8 mW. The "pull-back" effect occurs at the maximal displacement position, which is studied by the combination of experiments and simulation. Potential applications i… Show more

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Cited by 1 publication
(4 citation statements)
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“…Compared with III-V platform tunable lasers [23,67], it has lower cost and better compatibility with CMOS processes, benefited from the silicon platform. In contrast to the non-negligible transmission loss in the free-space structures due to the beam divergence [6,7], this tunable laser has a much lower optical transmission loss (< 2 dB/cm). As a result, it has the capability to construct a longer external cavity as compared with MEMS tunable lasers, lengthening from several tens of µm to several mm, which is helpful for obtaining narrow linewidth.…”
Section: Discussionmentioning
confidence: 95%
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“…Compared with III-V platform tunable lasers [23,67], it has lower cost and better compatibility with CMOS processes, benefited from the silicon platform. In contrast to the non-negligible transmission loss in the free-space structures due to the beam divergence [6,7], this tunable laser has a much lower optical transmission loss (< 2 dB/cm). As a result, it has the capability to construct a longer external cavity as compared with MEMS tunable lasers, lengthening from several tens of µm to several mm, which is helpful for obtaining narrow linewidth.…”
Section: Discussionmentioning
confidence: 95%
“…Although the chip-scale micro-electrical-mechanical-systems (MEMS) tunable laser realizes more compact and stable integration [5], the light path is still in free-space. Thus it suffers high optical loss caused by beam divergence in the air-medium external cavity [6,7]. This disadvantage limits the performance of the tunable laser and causes conflicts between the key parameters.…”
Section: Motivationmentioning
confidence: 99%
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