Nano-crater formation on a Si(111)-(7×7) surface by slow highly charged ion-impact

Tona, Masahide; Watanabe, Hirofumi; Takahashi, Satoshi; Nakamura, Nobuyuki; Yoshiyasu, Nobuo; Sakurai, Minoru; Terui, Toshifumi; Mashiko, Shinro; Yamada, Chikashi; Ohtani, S.

doi:10.1016/j.susc.2006.11.002

Cited by 63 publications

(32 citation statements)

References 30 publications

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“…Therefore, the interaction of HCI with surfaces may not be described in terms of an equilibrium charge state dependent stopping force. Furthermore, due to the localization of the energy deposition slow HCI can be used as an efficient tool for surface nano-structuring [13][14][15][16][17][18][19][20][21][22][23][24] and tuning of the electrical properties of materials [25], as well as a probe for surface energy deposition processes [26,27]. Recently, it has been shown that slow HCI can create pores in 1 nm thick carbon nanomembranes (CNM) [28,29] mainly by deposition of their potential energy [30].…”

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confidence: 99%

Charge Exchange and Energy Loss of Slow Highly Charged Ions in 1 nm Thick Carbon Nanomembranes

et al. 2014

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Experimental charge exchange and energy loss data for the transmission of slow highly charged Xe ions through ultra-thin polymeric carbon membranes are presented. Surprisingly, two distinct exit charge state distributions accompanied by charge exchange dependent energy losses are observed. The energy loss for ions exhibiting large charge loss shows a quadratic dependency on the incident charge state indicating that equilibrium stopping force values do not apply in this case. Additional angle resolved transmission measurements point on a significant contribution of elastic energy loss. The observations show that regimes of different impact parameters can be separated and thus a particle's energy deposition in an ultra-thin solid target may not be described in terms of an averaged energy loss per unit length. Modern approaches in ion and electron irradiation of solids such as nano-structuring of thin films or even structuring of free-standing monolayers such as graphene [1][2][3] or MoS 2 [4, 5] rely on models for structural and electronic defect formation. Most important for processes during ion-solid interaction is the amount of deposited energy and its dissipation channels [6]. We show that the energy loss and charge exchange of ions in very thin films, such as 2D-materials, show significant differences to solids with reduced thickness. The understanding of these differences is not only of importance for ion beam analysis of 2D-materials but in particular for manipulating and tailoring their properties. [7]. To probe interaction processes in very thin target materials slow highly charged ions (HCI) are ideal tools due to their energy deposition confinement to shallow surface regions. Besides the well known near-surface potential energy deposition [8,9] also an expected increased pre-equilibrium kinetic energy loss (stopping force) [10] is confined to a few nm at the surface. In the conventional description of both contributions to the stopping force, i.e. nuclear and electronic stopping, the charge state of an ion is identified with its equilibrium charge state by Bohr's stripping criterion [11,12]. The equilibrium charge state by Bohr is given as Q eq = Z 1/3 v/v 0 and describes the (average) charge state of an ion passing through a solid at a given velocity v (v 0 : Bohr's velocity, Z: nuclear charge of the ion). The charge state Q of slow highly charged ions is much higher than the equilibrium charge state Q eq (Q eq Q < ∼ Z). Therefore, the interaction of HCI with surfaces may not be described in terms of an equilibrium charge state dependent stopping force. Furthermore, due to the localization of the energy deposition slow HCI can be used as an efficient tool for surface nano-structuring [13][14][15][16][17][18][19][20][21][22][23][24] and tuning of the electrical properties of materials [25], as well as a probe for surface energy deposition processes [26,27]. Recently, it has been shown that slow HCI can create pores in 1 nm thick carbon nanomembranes (CNM) [28,29] mainly by deposition of their potential ...

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confidence: 99%

Charge Exchange and Energy Loss of Slow Highly Charged Ions in 1 nm Thick Carbon Nanomembranes

et al. 2014

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“…Various types of surface nanostructures such as nano-sized hillocks, pits or craters have so far been observed after impact of individual HCI on different materials [5,[16][17][18]. Their topography, appearance, and stability seem to depend sensitively on the material properties as well as on the potential energy, charge state, and kinetic energy of the incident ion (for a recent review see [19]).…”

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Phase Diagram for NanostructuringCaF2Surfaces by Slow Highly Charged Ions

et al. 2012

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“…The interaction between a HCI and surfaces results in emission of photons in the range of visible to X-ray, hundreds of secondary electrons, sputtering of secondary ions and modification of surface structure in nanometer scale. The effect of the kinetic energy on the material extends to a deep region, while the potential energy concentrates on only a few atomic layers of the topmost surface [1,2]. HCIs have large potential energy and can cause a significant interaction with the surface regardless of their kinetic energy.…”

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confidence: 99%

ESR Measurements of HOPG Irradiated with Highly Charged Ions

Nishida

Betsumiya

Sakurai

et al. 2018

e-J. Surf. Sci. Nanotech.

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Electron spin resonance (ESR) measurements were performed on highly oriented pyrolytic graphite (HOPG) samples irradiated with highly charged ions (HCIs). The interaction between a HCI and surfaces results in emission of photons in the range of visible to X-ray, hundreds of secondary electrons, sputtering of secondary ions and modification of surface structure in nanometer scale. In the present experiments, HCIs were produced by electron beam ion source (EBIS) and Ar 8+ and Ar 14+ were used for the irradiation. ESR measurement provides information on unpaired electrons of the sample. We investigated the dependence of defect formation on charge state and fluence of incident HCIs using ESR. The L1 line appeared in HOPG samples irradiated with HCIs at the low temperature region, and the intensity became larger at higher charge state and higher fluence.

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Nano-crater formation on a Si(111)-(7×7) surface by slow highly charged ion-impact

Cited by 63 publications

References 30 publications

Charge Exchange and Energy Loss of Slow Highly Charged Ions in 1 nm Thick Carbon Nanomembranes

Charge Exchange and Energy Loss of Slow Highly Charged Ions in 1 nm Thick Carbon Nanomembranes

Phase Diagram for NanostructuringCaF2Surfaces by Slow Highly Charged Ions

ESR Measurements of HOPG Irradiated with Highly Charged Ions

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