Nano-Imprinted Ultrahigh-Density Nanopore Arrays

Abstract

Nano-structured polymer stamps were prepared from porous anodic alumina templates. Prepolymers were poured onto the highly ordered porous anodic alumina templates, and they were cured by UV-irradiation. Simple separation of the elastic stamp from the nanoporous aluminum oxide leads to well replicated nano-stamps. The nanopatterns on the stamp were transferred as ultrahigh-density nanopore arrays on various substrates which are potentially applicable to the fabrication of ultrahigh-density metallic or semiconductor nanodot arrays for magnetic storage devices or display devices.