Nano material removal mechanism of 4H-SiC in ion implantation-assisted machining

Fan, Y. H.; Xu, Zongwei; Song, Ying; Dong, Bi‐Zhen; Xue, Zhifu; Liu, Bing; Liu, Lei; Tian, Dongyu

doi:10.1016/j.commatsci.2021.110837

Cited by 15 publications

(3 citation statements)

References 69 publications

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“…43 In the nano-cutting model, the variation of cutting force can be used to characterize the inter-atomic structure transformation in the machining progression, and it can be used to predict the tool wear instantly. 44 Figure 3 shows the variation of tangential force and normal force as a function of cutting distance and average cutting force predicted by various models. Tangential force and normal force both increase after 2 nm because the tool has not made contact with the workpiece before 2 nm.…”

Section: Resultsmentioning

confidence: 99%

Influence of the metal coating on nano-cutting process of cubic silicon carbide

Hu,

Dai

2023

Proceedings of the Institution of Mechanical Engineers, Part J:

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The effect of the metal coating on the machinability of cubic silicon carbide was investigated by molecular dynamics simulation. The effect of the metal coating on the surface of the workpiece was explained using cutting force, friction coefficient, surface morphology, stress, temperature, and tool wear. The results show that the influence of metal type on cutting force, surface morphology, and stress is insignificant for coating thickness. However, the model with Cu coating has a tool suspension key number of 400 at the maximum cutting distance. The number of tool suspension keys for the Ni-Ti coating model is around 1700, indicating that the type of coating has a significant impact on tool wear. Furthermore, the results also show that in the three metals of Cu, Ni and Ni -Ti, Cu coating has the greatest impact on improving cutting performance. Among them, the average cutting force of 1.5 nm Cu coating is about 33.3% lower than that of without coating, and the tool wear is about 26.7% lower. These results demonstrate the effects of the metal coating on the workpiece surface from a theoretical point of view.

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Section: Resultsmentioning

confidence: 99%

Influence of the metal coating on nano-cutting process of cubic silicon carbide

Hu,

Dai

2023

Proceedings of the Institution of Mechanical Engineers, Part J:

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“…In the studies of metal ion implantation, Fan et al [44] studied the effects of the Ga ion implantation dose on the polishing effects of 4H-SiC. There are also studies on the synergistic implantation of metal ions and H ions.…”

Section: Simulation Studies Of Sic Ion Implantationmentioning

confidence: 99%

Molecular Dynamics Simulation Studies of Properties, Preparation, and Performance of Silicon Carbide Materials: A Review

Yan

Liu

et al. 2023

Energies

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Silicon carbide (SiC) materials are widely applied in the field of nuclear materials and semiconductor materials due to their excellent radiation resistance, thermal conductivity, oxidation resistance, and mechanical strength. The molecular dynamics (MD) simulation is an important method to study the properties, preparation, and performance of SiC materials. It has significant advantages at the atomic scale. The common potential functions for MD simulations of silicon carbide materials were summarized firstly based on extensive literatures. The key parameters, complexity, and application scope were compared and analyzed. Then, the MD simulation of SiC properties, preparation, and performance was comprehensively overviewed. The current studies of MD simulation methods and applications of SiC materials were systematically summarized. It was found that the Tersoff potential was the most widely applied potential function for the MD simulation of SiC materials. The construction of more accurate potential functions for special application fields was an important development trend of potential functions. In the MD simulation of SiC properties, the thermal properties and mechanical properties, including thermal conductivity, hardness, elastic modulus, etc., were mainly studied. The correlation between MD simulations of microscopic processes and the properties of macroscopic materials, as well as the methods for obtaining different property parameters, were summarized. In the MD simulation of SiC preparation, ion implantation, polishing, sputtering, deposition, crystal growth, amorphization, etc., were mainly studied. The chemical vapor deposition (CVD) and sintering methods commonly applied in the preparation of SiC nuclear materials were reported rarely and needed to be further studied. In the MD simulation of SiC performance, most of the present studies were related to SiC applications in the nuclear energy research. The irradiation damage simulation in the field of nuclear materials was studied most widely. It can be found that SiC materials in the field of nuclear materials study were a very important topic. Finally, the future perspective of MD simulation studies of SiC materials were given, and development suggestions were summarized. This paper is helpful for understanding and mastering the general method of computation material science aimed at the multi-level analysis. It also has a good reference value in the field of SiC material study and MD method study.

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“…In addition, the temperature rising rate, minimum DOC and material removal rate can also be increased by ion implantation [164]. Furthermore, the increase of ion implantation dose is proposed to effectively form a uniform modified thick layer with promoted machinability and suppressed tool wear [165]. Even in brittle-mode cutting, crack propagation is blocked at the interface between crystalline layer and amorphous layer, and there is no subsurface damage extending into the crystalline layer of single crystal 6H-SiC.…”

Section: Ion Implantation-assisted Diamond Cuttingmentioning

confidence: 99%

Numerical simulation of materials-oriented ultra-precision diamond cutting: review and outlook

Zhao

Zhang

et al. 2023

Int. J. Extrem. Manuf.

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Ultra-precision diamond cutting is a promising machining technique for realizing ultra-smooth surface of different kinds of materials. While fundamental understanding of the impact of workpiece material properties on cutting mechanisms is crucial for promoting the capability of the machining technique, numerical simulation methods at different length and time scales act as important supplements to experimental investigations. In this work, we present a compact review on recent advancements in the numerical simulations of material-oriented diamond cutting, in which representative machining phenomena are systematically summarized and discussed by multiscale simulations such as molecular dynamics simulation and finite element simulation: the anisotropy cutting behavior of polycrystalline material, the thermos-mechanical coupling tool-chip friction states, the synergetic cutting responses of individual phase in composite materials, and the impact of various external energetic fields on cutting processes. In particular, the novel physics-based numerical models, which involve the high precision constitutive law associated with heterogeneous deformation behavior, the thermo-mechanical coupling algorithm associated with tool-chip friction, the configurations of individual phases in line with real microstructural characteristics of composite materials, and the integration of external energetic fields into cutting models, are highlighted. Finally, insights into the future development of advanced numerical simulation techniques for diamond cutting of advanced structured materials are also provided. The aspects reported in this review present guidelines for the numerical simulations of ultra-precision mechanical machining responses for a variety of materials.

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Nano material removal mechanism of 4H-SiC in ion implantation-assisted machining

Cited by 15 publications

References 69 publications

Influence of the metal coating on nano-cutting process of cubic silicon carbide

Influence of the metal coating on nano-cutting process of cubic silicon carbide

Molecular Dynamics Simulation Studies of Properties, Preparation, and Performance of Silicon Carbide Materials: A Review

Numerical simulation of materials-oriented ultra-precision diamond cutting: review and outlook

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