Nano-opto-electro-mechanical switch based on a four-waveguide directional coupler

Liu, Tianran; Pagliano, Francesco; Fiore, Andrea

doi:10.1364/oe.25.010166

Cited by 18 publications

(10 citation statements)

References 35 publications

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“…Recently, the attention has shifted to the control of the evanescent coupling between two optical modes proposed by Liu et al 27 . The next frontier in optical switching will require ~10 ns response times for packet switching.…”

Section: Applications To Light Control and Switchingmentioning

confidence: 99%

Nano-opto-electro-mechanical systems

2018

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A new class of hybrid systems that couple optical, electrical and mechanical degrees of freedom in nanoscale devices is under development in laboratories worldwide. These nano-opto-electromechanical systems (NOEMS) offer unprecedented opportunities to dynamically control the flow of light in nanophotonic structures, at high speed and low power consumption. Drawing on conceptual and technological advances from cavity optomechanics, they also bear the potential for highly efficient, low-noise transducers between microwave and optical signals, both in the classical and quantum domains. This Progress Article discusses the fundamental physical limits of NOEMS, reviews the recent progress in their implementation, and suggests potential avenues for further developments in this field.2

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Section: Applications To Light Control and Switchingmentioning

confidence: 99%

Nano-opto-electro-mechanical systems

2018

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“…In this structure the vertical displacement of a waveguide results in a change in the relative transmission from the two output waveguides. This is obtained by a combination of vertical and horizontal evanescent coupling 20 . The transducing concept is illustrated in Fig.…”

Section: Resultsmentioning

confidence: 99%

“…b Schematic illustration of light passing through the direction coupler before (up) and after (down) actuation. c Simulated transmission and d simulated electric field distribution (|E|) before and after displacement (55 nm) of an ideal device described in ref 20. .…”

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confidence: 99%

Integrated nano-optomechanical displacement sensor with ultrawide optical bandwidth

et al. 2020

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Optical read-out of motion is widely used in sensing applications. Recent developments in micro- and nano-optomechanical systems have given rise to on-chip mechanical sensing platforms, potentially leading to compact and integrated optical motion sensors. However, these systems typically exploit narrow spectral resonances and therefore require tuneable lasers with narrow linewidth and low spectral noise, which makes the integration of the read-out extremely challenging. Here, we report a step towards the practical application of nanomechanical sensors, by presenting a sensor with ultrawide (∼80 nm) optical bandwidth. It is based on a nanomechanical, three-dimensional directional coupler with integrated dual-channel waveguide photodiodes, and displays small displacement imprecision of only 45 fm/Hz1/2 as well as large dynamic range (>30 nm). The broad optical bandwidth releases the need for a tuneable laser and the on-chip photocurrent read-out replaces the external detector, opening the way to fully-integrated nanomechanical sensors.

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“…Similar to the silicon and oxide etch selectivity in the SOI platform, the InP and InGaAs(P) etch selectivity in the IMOS makes it an attractive platform for realizing compact and energy‐efficient nano‐opto‐electro‐mechanical systems (NOEMS) . A major advantage of NOEMS structures in IMOS platform is the access to the SOA layerstack.…”

Section: Membrane Integration Technologymentioning

confidence: 99%

Indium Phosphide Membrane Nanophotonic Integrated Circuits on Silicon

Jiao

Tol

Pogoretskii

et al. 2019

Physica Status Solidi (a)

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Photonic integration in a micrometer-thick indium phosphide (InP) membrane on silicon (IMOS) offers intrinsic and high-performance optoelectronic functions together with high-index-contrast nanophotonic circuitries. Recently demonstrated devices have shown competitive performances, including high sidemode-suppression ratio (SMSR) lasers, ultrafast photodiodes, and significant improvement in critical dimensions. Applications of the IMOS devices and circuits in optical wireless, quantum photonics, and optical cross-connects have proven their performances and high potential.

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Nano-opto-electro-mechanical switch based on a four-waveguide directional coupler

Cited by 18 publications

References 35 publications

Nano-opto-electro-mechanical systems

Nano-opto-electro-mechanical systems

Integrated nano-optomechanical displacement sensor with ultrawide optical bandwidth

Indium Phosphide Membrane Nanophotonic Integrated Circuits on Silicon

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