Nano-oxidation of silicon surfaces: Comparison of noncontact and contact atomic-force microscopy methods

Tello, Marta; Garcia, Ricardo Alexandrino

doi:10.1063/1.1385582

Cited by 127 publications

(77 citation statements)

References 23 publications

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“…264 Well documented examples include nanooxidation of metals and semiconductors. [264][265][266][267][268][269][270][271] Remarkably, even such non-classical processes as formation of silicon carbide from silicon oxide and ethanol under 20V bias were documented. [272][273][274][275][276] Note that unlike classical electrochemistry in planar electrode cells (or devices), the electric field falls away from the tip surface junction, precluding classical electrical breakdown and enabling unusual reactions to occur at high biases.…”

Section: C Tip Induced Electrochemical Writingmentioning

confidence: 99%

Ferroelectric or non-ferroelectric: Why so many materials exhibit “ferroelectricity” on the nanoscale

Vasudevan

Balke

Maksymovych

et al. 2017

Applied Physics Reviews

270

206

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Ferroelectric materials have remained one of the foci of condensed matter physics and materials science for over 50 years. In the last 20 years, the development of voltage-modulated scanning probe microscopy techniques, exemplified by Piezoresponse force microscopy (PFM) and associated time-and voltage spectroscopies, opened a pathway to explore these materials on a single-digit nanometer level. Consequently, domain structures, walls and polarization dynamics can now be imaged in real space. More generally, PFM has allowed studying electromechanical coupling in a broad variety of materials ranging from ionics to biological systems. It can also be anticipated that the recent Nobel prize 1 in molecular electromechanical machines will result in rapid growth in interest in PFM as a method to probe their behavior on single device and device assembly levels. However, the broad introduction of PFM also resulted in a growing number of reports on nearly-ubiquitous presence of ferroelectric-like phenomena including remnant polar states and electromechanical hysteresis loops in materials which are non-ferroelectric in the bulk, or in cases where size effects are expected to suppress ferroelectricity. While in certain cases plausible physical mechanisms can be suggested, there is remarkable similarity in observed behaviors, irrespective of the materials system. In this review, we summarize the basic principles of PFM, briefly discuss the features of ferroelectric surfaces salient to PFM imaging and spectroscopy, and summarize existing reports on ferroelectric-like responses in non-classical ferroelectric materials. We further discuss possible mechanisms behind observed behaviors, and possible experimental strategies for their identification.3

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Section: C Tip Induced Electrochemical Writingmentioning

confidence: 99%

Ferroelectric or non-ferroelectric: Why so many materials exhibit “ferroelectricity” on the nanoscale

Vasudevan

Balke

Maksymovych

et al. 2017

Applied Physics Reviews

270

206

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“…Pulsed biasing have shown to provide a better height/width aspect ratio [17] for the oxide lines with respect to DC biasing, while operating the AFM in intermittent contact mode, preserves the metal covered tip from rapid erosion [18] with respect to contact mode for which large electrostatic forces are superimposed to the tip. This direct-write patterning technique can be used as a single "negative" fabrication step without further processing since the oxidized areas becomes insulating.…”

Section: Materials and Techniquesmentioning

confidence: 99%

Niobium and niobium nitride SQUIDs based on anodized nanobridges made with an atomic force microscope

Faucher

Fournier

Pannetier

et al. 2002

Physica C: Superconductivity

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“…[1][2][3][4] This method is based on the field-induced activation of molecules within a water meniscus and the subsequent oxidation of the sample surface. [5][6][7] Local oxidation nanolithography has been applied to fabricate nanoscale electronic devices, 8,9 microelectromechanical systems 10 or templates for the direct growth of single-molecule magnets 11 or metallic nanoparticles. 12,13 Local oxidation is compatible with imprinting techniques, thus enables the patterning of large areas has been demonstrated.…”

mentioning

confidence: 99%

Nanopatterning of carbonaceous structures by field-induced carbon dioxide splitting with a force microscope

García¹,

Losilla²,

Martínez³

et al. 2010

Applied Physics Letters

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We report a tip-based nanofabrication method to generate carbon nanopatterns. The process uses the field-induced transformation of carbon dioxide gas into a solid material. It requires the application of low-to-moderate voltages ϳ10-40 V. The method allow us to fabricated sub-25 nm dots and it can be up scaled to pattern square centimeter areas. Photoemission spectroscopy shows that the carbon is the dominating atomic species of the fabricated structures. The formation of carbon nanostructures and oxides by atomic force microscope nanolithography expands its potential by providing patterns on the same sample with different chemical composition.

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Nano-oxidation of silicon surfaces: Comparison of noncontact and contact atomic-force microscopy methods

Abstract: Articles you may be interested inHigh aspect ratio nano-oxidation of silicon with noncontact atomic force microscopy

Cited by 127 publications

References 23 publications

Ferroelectric or non-ferroelectric: Why so many materials exhibit “ferroelectricity” on the nanoscale

Ferroelectric or non-ferroelectric: Why so many materials exhibit “ferroelectricity” on the nanoscale

Niobium and niobium nitride SQUIDs based on anodized nanobridges made with an atomic force microscope

Nanopatterning of carbonaceous structures by field-induced carbon dioxide splitting with a force microscope

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