Laser-Generated, Synchrotron, and Other Laboratory X-Ray and EUV Sources, Optics, and Applications II 2005
DOI: 10.1117/12.626316
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Nano-positioning control of 5-DOF manipulator for alignment of condenser in soft x-ray microscopy system

Kyu Gyeom Kim
1
,
Jae Hee Kim
2
,
Jong Hwan Min
3
et al.
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