Nano-scale Characterization of Ultra-thin Dielectrics/Conductive Films through Scanning Capacitance Microscopy Studies

Naitou, Yuichi; Watanabe, Heiji

doi:10.3131/jvsj2.54.437

J. Vac. Soc. Jpn.

2011

DOI: 10.3131/jvsj2.54.437

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Nano-scale Characterization of Ultra-thin Dielectrics/Conductive Films through Scanning Capacitance Microscopy Studies

Yuichi Naitou¹,

Heiji Watanabe²

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Nano-scale Characterization of Ultra-thin Dielectrics/Conductive Films through Scanning Capacitance Microscopy Studies

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References 45 publications

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