Nano step height measurement using an optical method

Wu, Junjie; Ding, Guo-Hui; Chen, Xin; Han, Tao; Cai, Xiaoyu; Lei, Lihua; Wei, Jiasi

doi:10.1016/j.sna.2017.02.019

Cited by 11 publications

(4 citation statements)

References 9 publications

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“…At present, good results have been achieved by particle swarm algorithm, ant colony algorithm, simulated annealing algorithm and genetic algorithm [5][6][7] . Among them, genetic algorithm is widely used in film parameter inversion calculation because of its adaptability and high precision [8][9] .…”

Section: Introductionmentioning

confidence: 99%

Determination the characteristic parameter of nano-film based on spectroscopic ellipsometry by improved adaptive genetic algorithm

Yue

Ding²,

Tao³

et al. 2023

AOPC 2022: Optoelectronics and Nanophotonics

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In order to obtain accurate nano-film characteristic parameters in the ellipsometry measurement process, an optimization algorithm for solving the thickness and complex refractive index of nano films by spectroscopic ellipsometry is proposed. An improved adaptive genetic algorithm (IAGA) has been proposed to process nano-film data, this method combines the evolutionary algebraic attenuation factor with the adaptive genetic algorithm. It can solve the problem that the genetic algorithm is premature and easy to fall into the local optimization. The algorithm is used to calculate the film parameters of silicon dioxide nano film thickness standard template with standard value of 49.7±0.4 nm in this paper. The results show that the relative error of the calculation results of the film thickness is less than 3%, and the error of refractive index is less than 0.1. At the same time, it is verified by experiments that the IAGA algorithm model can effectively optimize the number of iterations, and has the advantages of fast convergence speed and high measurement efficiency.

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Section: Introductionmentioning

confidence: 99%

Determination the characteristic parameter of nano-film based on spectroscopic ellipsometry by improved adaptive genetic algorithm

Yue

Ding²,

Tao³

et al. 2023

AOPC 2022: Optoelectronics and Nanophotonics

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show abstract

“…At present, good results have been achieved by ant colony algorithm, simulated annealing algorithm and genetic algorithm [5][6][7] . Among them, particle swarm optimization is widely used in the inversion of membrane parameters due to its strong adaptability and high accuracy [8][9] .…”

Section: Introductionmentioning

confidence: 99%

Measurement of optical constants of nano-film based on ellipsometric data at visible wavelength

Yue¹,

Ding²,

Lei³

et al. 2023

Ninth Symposium on Novel Photoelectronic Detection Technology and Applications

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“…Quantitative surface topography determination plays an important role in manufacturing design and control of micro/ nano electromechanical systems [1,2]. The surface roughness and local height variation are the essential structural parameters governing the electromechanical responses of the microdevices in engineering.…”

Section: Introductionmentioning

confidence: 99%

Subnanometer accuracy of surface characterization by reflected-light differential interference microscopy

Chan¹,

Du²,

Chen³

2022

Meas. Sci. Technol.

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We theorize the surface step characterization by reﬂected incoherent-light diﬀerential interference microscopy with consideration of the optical diﬀraction eﬀect. With the integration of localization analysis, we develop a quantitative diﬀerential interference optical system, by which we demonstrate that the axial resolution of measuring surface height variation is sensitive to the shear distance between the two spatially diﬀerentiated beams. We fabricate three nanometer-size steps by√ photolithography, and successfully characterize their 1D height variations with 0.13 nm/ Hz axial precision. Our result suggests that the optical diﬀerential interference microscopy can be used for real-time characterization of surface structure with a subnanometer accuracy and a large ﬁeld of view, which is greatly beneﬁcial to the surface characterization of micro/nano-electromechanical systems.

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Nano step height measurement using an optical method

Cited by 11 publications

References 9 publications

Determination the characteristic parameter of nano-film based on spectroscopic ellipsometry by improved adaptive genetic algorithm

Determination the characteristic parameter of nano-film based on spectroscopic ellipsometry by improved adaptive genetic algorithm

Measurement of optical constants of nano-film based on ellipsometric data at visible wavelength

Subnanometer accuracy of surface characterization by reflected-light differential interference microscopy

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