Nano-strip grating lines self-organized by a high speed scanning CW laser

Kaneko, Satoru; Ito, Takeshi; Akiyama, Kensuke; Yasui, Manabu; Kato, C.; Tanaka, Satomi; Hirabayashi, Yasuo; Mastuno, Akira; Nire, Takashi; Funakubo, Hiroshi; Yoshimoto, Mamoru

doi:10.1088/0957-4484/22/17/175307

Cited by 12 publications

(11 citation statements)

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“…Depending on the laser processing parameters and material, LIPPSs originate from electromagnetic effects such as the interference of the incident and surface scattered beams, or matter organization due to thermocapillary effects. [154] LIPSS on a Si surface, which was amorphized down to a depth of 250 nm by ion implantation, was demonstrated using a 532 nm CW laser and a 797 nm CW NIR laser, [155] as schematically shown in Figure 12e. The dual laser processing resulted in nanostripe grating lines (Figure 12f ) with periods adjustable in the range 530-800 nm by controlling the power of the green laser -c) Reproduced under the terms of the CC-BY license.…”

Section: Surface Nanostructures Via Laser-induced Phase and Morphological Transformationsmentioning

confidence: 99%

“…LIPSS on a Si surface, which was amorphized down to a depth of 250 nm by ion implantation, was demonstrated using a 532 nm CW laser and a 797 nm CW NIR laser, [ 155 ] as schematically shown in Figure 12e. The dual laser processing resulted in nanostripe grating lines (Figure 12f) with periods adjustable in the range 530–800 nm by controlling the power of the green laser (12–18 W), while keeping the power of the NIR laser constant.…”

Section: Laser‐processed Planar Photonic Devicesmentioning

confidence: 99%

“…f ) SEM micrograph showing laser-written microstripes with periodic nanostructures, which can be used as g) a large-area visible diffraction grating. (f,g) Reproduced with permission [155]. Copyright 2011, IOP Publishing Ltd.…”

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Laser Thermal Processing of Group IV Semiconductors for Integrated Photonic Systems

Aktaş

Peacock

2021

Advanced Photonics Research

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In the quest to expand the functionality and capacity of group IV semiconductor photonic systems, new materials and production methods are constantly being explored. In particular, flexible fabrication and postprocessing approaches that are compatible with different materials and allow for tuning of the components and systems are of great interest. Within this research area, laser thermal processing has emerged as an indispensable tool that can be applied to enhance and/or modify the material, structural, electrical and optical properties of group IV elemental and compound semiconductors at various stages of the production process. Herein, the recent progress made in the application of laser processing techniques to develop integrated semiconductor systems in both fiber‐ and planar‐based platforms is evaluated. Laser processing has allowed for the production of semiconductor waveguides with high crystallinity in the core and low optical losses, as well as postfabrication trimming of device characteristics and direct writing of tunable strain and composition profiles for bandgap engineering and optical waveguiding. For each platform, the current challenges and opportunities for the future development of laser‐processed integrated semiconductor photonic systems are presented.

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Section: Surface Nanostructures Via Laser-induced Phase and Morphological Transformationsmentioning

confidence: 99%

Section: Laser‐processed Planar Photonic Devicesmentioning

confidence: 99%

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Laser Thermal Processing of Group IV Semiconductors for Integrated Photonic Systems

Aktaş

Peacock

2021

Advanced Photonics Research

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“…The nano-grooves were produced with a period of 500 to 800 nm which was determined by the laser power. This simple method of combining a scanning laser with a high scanning speed of 300 m min −1 was expected to generate large-area nanostructure and high output [173,174]. In 2013, S. Kaneko et al reported that periodic nanostructures self-organized on the target surface after the CW laser scanned the target at a high speed of 300 m/min.…”

Section: Laser-induced Periodic Surface Structurementioning

confidence: 99%

The Fabrication of Micro/Nano Structures by Laser Machining

et al. 2019

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Micro/nano structures have unique optical, electrical, magnetic, and thermal properties. Studies on the preparation of micro/nano structures are of considerable research value and broad development prospects. Several micro/nano structure preparation techniques have already been developed, such as photolithography, electron beam lithography, focused ion beam techniques, nanoimprint techniques. However, the available geometries directly implemented by those means are limited to the 2D mode. Laser machining, a new technology for micro/nano structural preparation, has received great attention in recent years for its wide application to almost all types of materials through a scalable, one-step method, and its unique 3D processing capabilities, high manufacturing resolution and high designability. In addition, micro/nano structures prepared by laser machining have a wide range of applications in photonics, Surface plasma resonance, optoelectronics, biochemical sensing, micro/nanofluidics, photofluidics, biomedical, and associated fields. In this paper, updated achievements of laser-assisted fabrication of micro/nano structures are reviewed and summarized. It focuses on the researchers’ findings, and analyzes materials, morphology, possible applications and laser machining of micro/nano structures in detail. Seven kinds of materials are generalized, including metal, organics or polymers, semiconductors, glass, oxides, carbon materials, and piezoelectric materials. In the end, further prospects to the future of laser machining are proposed.

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“…LIPSS with a spatial period in the order of the laser wavelength (Λ ≈ λ) are usually referred to as low spatial frequency LIPSS (LSFL) and those with significant smaller period (Λ λ) as high spatial frequency LIPSS (HSFL). Whereas LSFL have been studied since 1965 with continuous wave lasers [127] and different pulse durations [128,129,117], the HSFL type is more recently observed in the context of picosecond and femtosecond pulse irradiation [117,102]. For LSFL, Λ has been found to vary with the wavelength [121,92,76], the angle of incidence θ [76,114] and number of pulses [130].…”

Section: Periodic Surface Structuresmentioning

confidence: 99%

The spatial emergence of laser-induced periodic surface structures under lateral displacement irradiation conditions

Eichstädt¹

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University of Twente Blank Justus EichstädtThe spatial emergence of laser-induced periodic surface structures under lateral displacement irradiation conditions This book is archived in the library of the University of Twente and at the same time a dissertation. Detailed information and a digital version of this book can be found on the following web page: www.utwente.nl and under the specified DOI. A printed and high-resolution digital version can be ordered at the author. University of Twente PrefaceWith this book, I would like to present my contribution to science. The subject concerns the determination of laser irradiation parameters, an issue that puzzled me already for quite some time. Hence, the content of this book is determined by the experience that I have made with the analysis of laser experiments. It was necessary to understand the laser irradiation and the spatial emergence. So, I simply calculated the irradiation, as presented in Chapter 2 and 4, and started to think about the thresholds, as presented in Chapter 3. This work ended up in this scientific contribution.In the following, I will briefly describe the framework in which this work has been carried out. The research results were compiled at the Chair of Applied Laser Technology within the Faculty of Engineering Technology of the University of Twente in Enschede -The Netherlands in the years 2009 to 2014. In the first three years of this period a European research project has been carried out. This project had the acronym NanoClean. The aim of NanoClean was the mass production of permanent self-cleaning plastic parts for the automotive sector under industrial manufacturing conditions. Therefore, a previously lab-scale demonstrated laser based manufacturing technology was implemented and evaluated for an industrial application. NanoClean was performed in a collaboration of seven project partners: Maier S. Coop. A third project was related to the study of the tribological properties of LIPSS for precision positioning applications. This research was carried out by the Chair of Applied Laser Technology. The friction measurements have been performed at the Laboratory for Surface Technology and Tribology by Justus Eichstädt. Furthermore, the results were applied in the national M2i research project: Texturing using ultra short laser pulses, abbreviated TULP, with the industrial partners ASML Holding N.V., Lightmotif B.V., FEI Netherlands B.V., Holst Centre -TNO, Philips Applied V VI Preface Technologies. As part of this, an application project was carried out, in which adhesion measurements have been performed at TNO. The writing of this thesis and a part of the analysis were finished in Rathenow.Rathenow, summer 2015, Justus Eichstädt

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Nano-strip grating lines self-organized by a high speed scanning CW laser

Cited by 12 publications

References 32 publications

Laser Thermal Processing of Group IV Semiconductors for Integrated Photonic Systems

Laser Thermal Processing of Group IV Semiconductors for Integrated Photonic Systems

The Fabrication of Micro/Nano Structures by Laser Machining

The spatial emergence of laser-induced periodic surface structures under lateral displacement irradiation conditions

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