Nanochannel fabrication by imprinting-induced cracks

Xia, Liangping; Zhang, Man; Zheng, Yang; Cui, Huanqing; Yin, Shi; Hu, Song; Du, Chunlei

doi:10.1063/1.4866155

Cited by 7 publications

(1 citation statement)

References 13 publications

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“…At present, the fabrication methods for nano-channels mainly include high-resolution machining technology [ 13 , 14 , 15 ], sacrificing layer technology [ 16 , 17 ], the crack method [ 18 , 19 ], PDMS deformation [ 20 , 21 ], molecular self-assembly [ 22 , 23 , 24 ], and nano-imprinting technology [ 25 , 26 , 27 ]. The high-resolution machining technology mentioned above uses nanoscale resolution to expose or directly write nano-channels on the substrate, which provides the advantages of flexibility, controllability, high accuracy, and good quality.…”

Section: Introductionmentioning

confidence: 99%

Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition

2023

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A low-cost method of fabrication of high aspect ratio nano-channels by thermal nano-imprinting and Parylene deposition is proposed. SU-8 photoresist nano-channels were first manufactured by thermal nano-imprinting, and Parylene deposition was carried out to reduce the width of the nano-channels and increase the aspect ratio. During the process, the side walls of the SU-8 nano-channels were covered with the Parylene film, reducing the width of the nano-channels, and the depth of the channels increased due to the thickness of the Parylene film deposited on the surface of the SU-8 nano-channels, more so than that at the bottom. The influence of Parylene mass on the size of nano-channels was studied by theoretical analysis and experiments, and the deposition pressure of Parylene was optimized. The final high aspect ratio nano-channels are 46 nm in width and 746 nm in depth, of which the aspect ratio is 16. This simple and efficient method paves the way for the production of high aspect ratio nano-channels.

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Section: Introductionmentioning

confidence: 99%

Fabrication of High Aspect Ratio Nano-Channels by Thermal Nano-Imprinting and Parylene Deposition

2023

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Capillary Filling of Nanoscale Channels and Surface Structure

Kriel

Sedev

Priest

2014

Israel Journal of Chemistry

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Nanoscale surface structures and channels are of intense interest for the very high surface‐to‐volume ratios involved. For extremely small systems, it may become difficult to distinguish between bulk and interface as well as their respective effects on the fluid volume. We review capillary filling of nanochannels and wicking in nanoscale surface structures. Both processes are of fundamental importance for the initial filling and successful operation of nanofluidic devices. We conclude that, despite the small scales involved, Washburn’s description of the spontaneous capillary filling of nanochannels is reliable. Similarly, nanowicking follows conventional capillarity theory closely. Nonetheless, open questions remain about the role and significance of line tension, precursor films and contact line pinning. The exact consequences of a diffuse interface or contact line are yet to be fully understood.

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