Nanocrystalline diamond pn-structure grown by Hot-Filament CVD

Zimmermann, Tom; Janischowsky, K.; Denisenko, Andrej; Guillén, F.J. Hernández; Kubovič, M.; Gruen, D. M.; Kohn, E.

doi:10.1016/j.diamond.2005.07.025

Cited by 17 publications

(7 citation statements)

References 6 publications

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“…1C) revealed their composite nature, attested by the occurrence of the diamond peak combined with the graphitic peak and the typical bands of nanometric diamond (m = 1228 cm À1 [31]; m = 1140 and 1480 cm À1 [32,33]). In addition, NCD films are formed by diamond crystals of nanometric size, usually between 10 and 100 nm [34,35]. The crystallite size of the present NCD films has an average value of 28 nm, as estimated by X-ray diffraction in a previous work [36].…”

Section: Discussionmentioning

confidence: 99%

Cytotoxicity evaluation of nanocrystalline diamond coatings by fibroblast cell cultures

et al. 2009

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Section: Discussionmentioning

confidence: 99%

Cytotoxicity evaluation of nanocrystalline diamond coatings by fibroblast cell cultures

et al. 2009

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“…[1][2][3] One remarkable characteristic feature of this material is a grain size independent of the film thickness, obtained by the high secondary nucleation rate during deposition. [1] The small grain size allows the deposition of very smooth diamond films with rms values down to 10 nm.…”

Section: Introductionmentioning

confidence: 99%

“…[1] The small grain size allows the deposition of very smooth diamond films with rms values down to 10 nm. [1,[4][5][6][7] Furthermore, both p-and n-type doped UNCD/ NCD films are available with high carrier concentrations, [3,[8][9][10] a requirement for applications in sensing devices based on electro-chemistry [11][12][13] or MEMS technology. [14,15] Experimentally, it was found that the morphology of the UNCD/NCD films depends strongly on the diamond nucleation density on the substrate material; low nucleation densities result in a surface consisting of an arrangement of separated diamond spheres, whereas each sphere consists of UNCD.…”

Section: Introductionmentioning

confidence: 99%

Modelling the Influence of the Nucleation Density on Ultra Nano Crystalline Diamond Growth Morphology: Preliminary Results

Sternschulte

Rabl

Steinmüller‐Nethl³

et al. 2008

Chemical Vapor Deposition

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The morphology of ultra nanocrystalline diamond (UNCD) films is modeled by a pure geometrical approach. Diamond spheres with a fixed radius are added randomly spread on a smooth substrate surface covered with diamond seeds in varied primary nucleation density. The secondary nucleation rate and the nucleation density on the bare substrate define the distribution of diamond spheres during each cycle. In preliminary results, this simple geometrical model leads to good comparison with published experimental data; low primary nucleation densities yield to the growth of separated diamond islands with a rough surface, the smoothest films are obtained with the highest primary nucleation densities.

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“…Diamond and diamond-like thin films are important for technological applications ranging from microelectronics to tribologics. 1,2 The realization of nano-and ultrananocrystalline diamond (NCD and UNCD) films has enhanced the efficacy of diamond films in the fields of microelectromechanical, optical, and other devices. 3,4 The average grain size of these films ranges from tens to hundreds of nanometers, with the volume of graphitic sp 2 bonding reduced to 10% in UNCD.…”

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confidence: 99%

Effect of chromium underlayer on the properties of nano-crystalline diamond films

Garratt

AlFaify

Yoshitake

et al. 2013

Applied Physics Letters

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This paper investigated the effect of chromium underlayer on the structure, microstructure, and composition of the nano-crystalline diamond films. Nano-crystalline diamond thin films were deposited at high temperature in microwave-induced plasma diluted with nitrogen, on single crystal silicon substrate with a thin film of chromium as an underlayer. Characterization of the film was implemented using non-Rutherford backscattering spectrometry, Raman spectroscopy, near-edge x-ray absorption fine structure, x-ray diffraction, and atomic force microscopy. Nanoindentation studies showed that the films deposited on chromium underlayer have higher hardness values compared to those deposited on silicon without an underlayer. Diamond and graphitic phases of the films evaluated by x-ray and optical spectroscopic analyses determined consistency between the sp 2 and sp 3 phases of carbon in chromium sample to that of diamond grown on silicon. Diffusion of chromium was observed using ion beam analysis which was correlated with the formation of chromium complexes by x-ray diffraction. V

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Nanocrystalline diamond pn-structure grown by Hot-Filament CVD

Cited by 17 publications

References 6 publications

Cytotoxicity evaluation of nanocrystalline diamond coatings by fibroblast cell cultures

Cytotoxicity evaluation of nanocrystalline diamond coatings by fibroblast cell cultures

Modelling the Influence of the Nucleation Density on Ultra Nano Crystalline Diamond Growth Morphology: Preliminary Results

Effect of chromium underlayer on the properties of nano-crystalline diamond films

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